Monolithically Integrated Bidirectional Flow Sensor and Stacked Temperature/Humidity Sensor based on CMOS-Compatible MEMS Technology

W Xu, L Hong, X Pan - IEEE Transactions on Instrumentation …, 2024 - ieeexplore.ieee.org
In this article, we present a monolithically integrated multifunctional sensor for respiratory
applications, which consists of a bidirectional micro flow sensor with dual microheaters and …

Fabrication and Characterization of Monolithic Integrated Three-Axis Acceleration/Pressure/Magnetic Field Sensors

Y Wang, Y Xiao, X Zhao, D Wen - Micromachines, 2024 - mdpi.com
In order to realize the measurement of three-axis acceleration, pressure, and magnetic field,
monolithic integrated three-axis acceleration/pressure/magnetic field sensors are proposed …

Theoretical and experimental study of the critical dimension of low-cost low-frequency micro search coil magnetometer for IoT smart energy monitoring

H Tavakkoli, X Zhao, H Luo, M Duan… - IEEE Sensors …, 2023 - ieeexplore.ieee.org
In this letter, we theoretically calculated the critical dimension for achieving minimum noise
equivalent magnetic induction (NEMI) in a micro search coil magnetometer (μSCM) with an …

Investigation of MEMS Thermal Wind Sensors in Martian Environment

S Duan, Z Cao, Z Yi, M Qin… - IEEE Transactions on …, 2024 - ieeexplore.ieee.org
This article explores the performance of micro-electromechanical systems (MEMSs) thermal
wind sensors in the Martian environment for the first time. Theoretical analysis, as well as …

Performance Improvement of Integrated MEMS Temperature, Humidity, and Air Velocity Sensors for Application in Smart Buildings

X Zhao, H Tavakkoli, W Xu, YK Lee - IEEE Transactions on …, 2024 - ieeexplore.ieee.org
Human thermal comfort is highly influenced by environmental parameters such as
temperature, relative humidity (RH), and air velocity in addition to personal factors. The …

多功能传感器集成综述

吕佩珏, 黄哲, 王晓明, 杨知雨, 林晨希, 王铭强, 杨洋… - 电子与封装, 2023 - ep.org.cn
随着5G, 智能汽车, 物联网(IoT), 智慧医疗等市场的快速增长, 其对传感器需求广泛,
要求传感器具备微型化, 集成化, 智能化, 低功耗等特点. 概述了国内外学者在环境 …

Accuracy Enhancement of Micro-PMV Sensor System for Human Thermal Comfort Measurements through Machine Learning

H Luo, Z Xu, J Wu, H Tavakkoli, Z Ke… - 2023 IEEE 16th …, 2023 - ieeexplore.ieee.org
In this paper, we propose a machine learning (ML)-based method to significantly improve
the accuracy of micro-PMV (Predicted Mean Vote) sensor system for Human Thermal …

Winter Thermal Suit with AutoTemperature Control

R Premkumar, L Vijayaraja… - 2023 5th …, 2023 - ieeexplore.ieee.org
The automated temperature controller in a thermal suit is the subject of the study. The
product's concept is to detect the user's body temperature and the ambient temperature, and …

Forked Finger Electrode Based Acquisition Circuit and Humidity Correlation Model Design

Q Li, P Yan, Z Ding, J Cai, B Chen… - Mechatronics and …, 2024 - ebooks.iospress.nl
With the continuous development of industry, humidity sensors have long been used in
many fields such as industrial and agricultural production, public meteorological services …