MEMS and FOG technologies for tactical and navigation grade inertial sensors—Recent improvements and comparison
O Deppe, G Dorner, S König, T Martin, S Voigt… - Sensors, 2017 - mdpi.com
In the following paper, we present an industry perspective of inertial sensors for navigation
purposes driven by applications and customer needs. Microelectromechanical system …
purposes driven by applications and customer needs. Microelectromechanical system …
An Auto-Tuning Continuous-Time Bandpass Sigma-Delta Modulator with Signal Observation for MEMS Gyroscope Readout Systems
C Ju, X Li, J Zou, Q Wei, B Zhou, R Zhang - Sensors, 2020 - mdpi.com
This paper presents the design and implementation of an auto-tuning continuous-time
bandpass sigma-delta (ΣΔ) modulator for micro-electromechchanical systems (MEMS) …
bandpass sigma-delta (ΣΔ) modulator for micro-electromechchanical systems (MEMS) …
Low power and highly precise closed-loop driving circuits for piezoelectric micromirrors with embedded capacitive position sensors
This work presents an integrated closed-loop driving circuit for previously reported PZT
resonant micro-mirrors, which is based on embedded capacitive position sensors for …
resonant micro-mirrors, which is based on embedded capacitive position sensors for …
Resonance frequency control and digital correction for capacitive MEMS gyroscopes within electromechanical bandpass delta-sigma-modulators
This paper reports on a resonance frequency control for vibratory MEMS gyroscopes. The
angular rate readout system is based on a continuous-time electromechanical bandpass …
angular rate readout system is based on a continuous-time electromechanical bandpass …