The nanoscale control afforded by scanning probe microscopes has prompted the
development of a wide variety of scanning-probe-based patterning methods. Some of these …

Fundamental aspects and state-of-the-art results of thermal scanning probe lithography (t-
SPL) are reviewed here. t-SPL is an emerging direct-write nanolithography method with …

Thermal scanning probe lithography (tSPL) is a nanofabrication method for the chemical
and physical nanopatterning of a large variety of materials and polymer resists with a lateral …

Nanoimprint lithography (NIL) is more than a planar high-end technology for the patterning
of wafer-like substrates. It is essentially a 3D process, because it replicates various stamp …

When designing a new nanostructure or microstructure, one can follow a processing‐based
manufacturing pathway, in which the structure properties are defined based on the …

Electric-field-assisted atomic force microscope (E-AFM) nanolithography is a novel polymer-
patterning technique that has diverse applications. E-AFM uses a biased atomic force …

Graphene has been a material of interest due to its versatile properties and wide variety of
applications. However, production has been one of the most challenging aspects of …

Atomic force microscope (AFM)-based nanomanufacturing, as a low-cost and easy-to-setup
technique, enables high-resolution maskless nanofabrication processes for arbitrary …

Thermal atomic force microscope (AFM) nanolithography enables many nanofabrication
applications, but it requires special thermal probes. In this paper, we developed a vibration …

Poly (phthalaldehyde)(pPHA) and copolymers with aliphatic aldehydes were investigated as
dry-develop, positive-tone photoresist. Exposure of the films loaded with a photoacid …