Pull-in instability as an inherently nonlinear and crucial effect continues to become
increasingly important for the design of electrostatic MEMS and NEMS devices and ever …

The implementation of electrostatic microactuators is one of the most popular technical
solutions in the field of micropositioning due to their versatility and variety of possible …

Common quasi-static electrostatic micro actuators have significant limitations in deflection
due to electrode separation and unstable drive regions. State-of-the-art electrostatic …

We investigate the nonlinear dynamic behavior of an electrostatic MEMS mirror. The MEMS
mirror is driven by repulsive force actuators, which avoid pull-in instability and enable large …

Microelectromechanical System (MEMS)-based scanning mirrors are important optical
devices that have been employed in many fields as a low-cost and miniaturized solution. In …

This current work focuses on the study of residual stress introduced in thin surface
micromachined films due to the thermal stress. A model is presented here to study the …

Compliant manipulators are advanced robotic systems articulated by the flexure joints to
deliver highly repeatable motion. Using the advantage of elastic deflection, these flexure …

A tri-electrode electrostatic actuator with one moving microelectromechanical systems
(MEMS) electrode and two stationary electrodes (tri-electrode actuator topology) is …

Development of biotechnology and technologies related to small size object position and
placement in working area, ensuring desired orientation and fitting during movement into …

MEMS resonators are designed for a fixed resonant frequency. Therefore, any shift in the
resonant frequency of the final fabricated structure can be a denting factor for its suitability …