Microelectronic materials, microfabrication processes, micromechanical structural configuration based stiffness evaluation in MEMS: A review

M Manvi, KBM Swamy - Microelectronic Engineering, 2022 - Elsevier
Microsystem or micro-electro-mechanical system (MEMS) is a revolutionary enabling
technology, that is responsible for many of the technological advancements over the past …

Design and sensitivity analysis of capacitive MEMS pressure sensor for blood pressure measurement

KS Rao, W Samyuktha, DV Vardhan, BG Naidu… - Microsystem …, 2020 - Springer
This paper presents the design and simulation of a MEMS based clamped capacitive
pressure sensor for blood pressure measurement. Normally, Blood pressure for human …

Analysis of PDMS based MEMS device for drug delivery systems

K Srinivasa Rao, GV Ganesh, G Sai Lakshmi… - Microsystem …, 2021 - Springer
This is paper briefly explains the MEMS based piezoelectrically actuated micropump and its
applications for the drug delivery system. The micropump is designed and it consists of four …

Implementation of IIoT based smart crop protection and irrigation system

I Nanda, S Chadalavada, M Swathi… - Journal of Physics …, 2021 - iopscience.iop.org
A centralizing method in the area of IIoT (Industrial Internet of Things) contrived for
understanding agriculture which is preceding the arrangements low-power devices [5]. This …

Design and Modification of MEMS Based Micro Cantilever

TS Fanse - arXiv preprint arXiv:2111.01890, 2021 - arxiv.org
: It goes without saying that at present MEMS Technology became one of the latest and
emerging methods because of its miniaturization and effective cost. Now near the beginning …

Design and performance analysis of PDMS based micropump

KS Rao, K Chandrasekharam, SB Sai Sri… - … on Electrical and …, 2020 - Springer
This paper presents the design and performance analysis of MEMS based piezoelectrically
actuated micropump for drug delivery systems. The proposed micropump have achieved a …

[PDF][PDF] Study and Analysis of MEMS based Micro-Cantilever Sensor and its Medical Applications

MKK Shukla, T Muthumanickam, T Sheela - 2019 - researchgate.net
Presently early detection of disease became a challenge because most of the people are
usually suffering from chronicle disease and losing their lives. So in order to avoid sudden …

Design and modelling of nano particle-based alcohol gas sensors

N Siddaiah, PP Saradhi, DS Kumar… - AIP Conference …, 2021 - pubs.aip.org
This paper discusses about nano particle-based gas sensors to study the different
parameters like power consumption, temperature uniformity, change in resistance …

[引用][C] Modelling And Simulation of An Energy Harvester with Piezoelectric Material Using COMSOL Multiphysics 5.3

O OLAYEBI - 2022 - m.topflightvalet.com
In this work, piezoelectric cantilever energy harvesters with different materials of varying
dimensions and shapes were studied. The simulations were carried out to predict the output …

Capacitive Accelerometers with Beams Based on Alternated Segments of Different Widths

M Tecpoyotl-Torres, P Vargas-Chable… - Actuators, 2020 - mdpi.com
Microelectromechanical (MEM) Accelerometers measure the accelerations or vibrations
experienced by objects due to inertial forces or mechanical excitations. To improve their …