Recently, piezoelectric thin films including zinc oxide (ZnO) and aluminium nitride (AlN)
have found a broad range of lab-on-chip applications such as biosensing, particle/cell …

This paper presents a short review of the microwave acoustics area, where exciting material
innovations and performance advancements have been made in the past decade. The ever …

Since two decades piezoelectric MEMS resonator research has been making a headway by
leaps and bounds in multiple fronts such as micro/nanofabrication techniques, device and …

Micro and nanoelectromechanical systems M/NEMS have been extensively investigated
and exploited in the past few decades for various applications and for probing fundamental …

In this paper, we review a recent technology development based on coupled MEMS
resonators that has the potential of fundamentally transforming MEMS resonant sensors …

This paper is a review of the remarkable progress that has been made during the past few
decades in design, modeling, and fabrication of micromachined resonators. Although micro …

In this work, we present first-order antisymmetric (A1) mode resonators in 128° Y-cut lithium
niobate (LiNbO 3) thin films with electromechanical coupling coefficients (k 2) as large as …

We present a high coupling coefficient, k eff 2, micromechanical resonator based on the
propagation of SH0 Lamb waves in thin, suspended plates of single crystal X-cut lithium …

Phononic crystals are the acoustic wave analogue of photonic crystals. Here a periodic array
of scattering inclusions located in a homogeneous host material forbids certain ranges of …

This paper provides a comprehensive review of advanced radio frequency (RF) filter
technologies available in miniature chip or integrated circuit (IC) form for wireless …