Micro-and nanomechanical sensors for environmental, chemical, and biological detection

PS Waggoner, HG Craighead - Lab on a Chip, 2007 - pubs.rsc.org
Micro-and nanoelectromechanical systems, including cantilevers and other small scale
structures, have been studied for sensor applications. Accurate sensing of gaseous or …

Nonlinear dynamics and its applications in micro-and nanoresonators

JF Rhoads, SW Shaw, KL Turner - 2010 - asmedigitalcollection.asme.org
This review provides a summary of work on the resonant nonlinear dynamics of micro-and
nanoelectromechanical systems. This research area, which has been active for …

Nitinol manufacturing and micromachining: A review of processes and their suitability in processing medical-grade nitinol

JW Mwangi, LT Nguyen, VD Bui, T Berger… - Journal of manufacturing …, 2019 - Elsevier
An increase in geriatric population coupled by a growing incidence of different vascular
ailments including peripheral vascular and coronary artery diseases imply that the medical …

Efficient electrothermal actuation of multiple modes of high-frequency nanoelectromechanical resonators

I Bargatin, I Kozinsky, ML Roukes - Applied Physics Letters, 2007 - pubs.aip.org
The authors observed resonances from multiple vibrational modes of individual silicon-
carbide-based nanomechanical resonators, covering a broad frequency range from several …

Vibration analysis of scale-dependent thin shallow microshells with arbitrary planform and boundary conditions

AM Dehrouyeh-Semnani, H Mostafaei - International Journal of Engineering …, 2021 - Elsevier
The current article presents a thorough investigation into the natural frequencies and mode
shapes of thin doubly curved shallow microshells by taking into account the influence of …

On the mechanics of microshells of revolution

AM Dehrouyeh-Semnani, H Mostafaei - International Journal of Engineering …, 2021 - Elsevier
In the current investigation, a novel mathematical formulation is established for the size-
dependent thin doubly curved microshells of revolution with arbitrary meridian curve based …

Nonlinear dynamics and its applications in micro-and nanoresonators

JF Rhoads, SW Shaw… - Dynamic systems …, 2008 - asmedigitalcollection.asme.org
This review provides a summary of the work completed to date on the nonlinear dynamics of
resonant micro-and nanoelectromechanical systems (MEMS/NEMS). This research area …

Vibration mode shifting due to scale-dependency for cylindrical, conical, and spherical microshells

H Mostafaei, AM Dehrouyeh-Semnani - Structures, 2023 - Elsevier
Microshells structures are broadly utilized in micro-electro-mechanical systems (MEMS)
such as microresonator, microgyroscope, microsensor, microactuator, microantenna, and …

Pressure dependent resonant frequency of micromechanical drumhead resonators

DR Southworth, HG Craighead, JM Parpia - Applied Physics Letters, 2009 - pubs.aip.org
We examine the relationship between squeeze film effects and resonance frequency in
drum-type resonators. We find that the resonance frequency increases linearly with pressure …

Reducing anchor loss in MEMS resonators using mesa isolation

M Pandey, RB Reichenbach… - Journal of …, 2009 - ieeexplore.ieee.org
In microelectromechanical systems resonators, dissipation of energy through anchor points
into the substrate adds to resonator energy loss, contributing to low values of Q. A design for …