Progresses in Synthesis and Application of SiC Films: From CVD to ALD and from MEMS to NEMS

M Fraga, R Pessoa - Micromachines, 2020 - mdpi.com
A search of the recent literature reveals that there is a continuous growth of scientific
publications on the development of chemical vapor deposition (CVD) processes for silicon …

Discussion on electric power supply systems for all electric aircraft

H Schefer, L Fauth, TH Kopp, R Mallwitz, J Friebe… - IEEE …, 2020 - ieeexplore.ieee.org
The electric power supply system is one of the most important research areas within
sustainable and energy-efficient aviation for more-and especially all electric aircraft. This …

Silicon carbide thin film technologies: recent advances in processing, properties, and applications-Part I

AE Kaloyeros, B Arkles - ECS Journal of Solid State Science and …, 2023 - iopscience.iop.org
In Part I of a two-part report, we provide a detailed and systematic review of the latest
progress in cutting-edge innovations for the silicon carbide (SiC) material system, focusing …

Advanced technology for fabrication of reaction-bonded SiC with controlled composition and properties

PS Grinchuk, MV Kiyashko, HM Abuhimd… - Journal of the European …, 2021 - Elsevier
An advanced fabrication technology of reaction-bonded SiC is developed, which includes
the preparation of a C/SiC preform by repeated cycles of phenolic resin impregnation and …

Coexistence of space charge limited and variable range hopping conduction mechanism in sputter-deposited Au/SiC metal–semiconductor–metal device

A Arora, S Mourya, N Singh, S Kumar… - … on Electron Devices, 2023 - ieeexplore.ieee.org
Despite being the cornerstone of high-temperature and high-power applications, the
fabrication of silicon carbide (SiC) thin films has been a major challenge among research …

Silicon Carbide Thin Film Technologies: Recent Advances in Processing, Properties, and Applications: Part II. PVD and Alternative (Non-PVD and Non-CVD) …

AE Kaloyeros, B Arkles - ECS Journal of Solid State Science and …, 2024 - iopscience.iop.org
Silicon carbide (SiC x) thin films deposition processes fall primarily into three main
categories:(1) chemical vapor deposition (CVD) and its variants, including plasma enhanced …

The quantitative 6H-SiC crystal damage depth profiling

M Gloginjić, M Erich, M Kokkoris, E Liarokapis… - Journal of nuclear …, 2021 - Elsevier
The hexagonal silicon carbide (6H-SiC) is one of materials used in nuclear applications, and
as such is exposed to crystal damage inducing by variety of energetic particles like neutrons …

Composition-Dependent Phonon and Thermodynamic Characteristics of C-Based XxY1−xC (X, Y ≡ Si, Ge, Sn) Alloys

DN Talwar - Inorganics, 2024 - mdpi.com
Novel zinc-blende (zb) group-IV binary XC and ternary XxY1− xC alloys (X, Y≡ Si, Ge, and
Sn) have recently gained scientific and technological interest as promising alternatives to …

Effect of Mn+2 Doping and Vacancy on the Ferromagnetic Cubic 3C-SiC Structure Using First Principles Calculations

NM Sultan, TMB Albarody, KO Obodo, MB Baharom - Crystals, 2023 - mdpi.com
Wide bandgap semiconductors doped with transition metals are attracting significant
attention in the fabrication of dilute magnetic semiconductor devices (DMSs). The working …

Effect of SF6 Plasma Etching on the Optical, Morphological and Structural Properties of SiC Films

NK de Almeida Maribondo Galvão, A Godoy Junior… - Silicon, 2023 - Springer
Amorphous silicon carbide (a-SiC) films hold promise for microelectronic and MEMS
devices. Prior to their use in microfabricated devices, these films undergo plasma etching …