Optically-sectioned structured illumination microscopy (OS-SIM) is broadly used for
biological imaging and engineering surface measurement owing to its simple, low-cost …

High-performance optics puts stringent requirements on the defect control of transparent
optical components (TOCs). In order to accurately and reliably detect the surface and …

Abstract Precise three-dimensional (3D) inspection of surface and subsurface defects for
optical components has become more and more urgent in high-power laser systems. In this …

A differential optical sectioning microscopy with structured-illumination (DOSM-SI) with
enhanced axial precision is explored in this paper for three-dimensional (3D) measurement …

A single-exposure microscopic profilometry using artificial neural network (ANN) was
developed for 3-D profile reconstruction of precise surface geometry. Optical profilometry is …

Optically-sectioned structured illumination microscopy (OS-SIM) is an important tool for
biological imaging and engineering surface measurements. However, in the current OS-SIM …

摘要结构光照明显微成像(SIM) 技术是一种在超分辨显微成像领域极具代表性的技术.
尽管结构光照明能够提升空间分辨率, 但其在实现超分辨过程中需要采集多幅图像, 而且 …

To meet the requirements of the large sensing measurement range and high axial depth
resolution for profile measurement, a dual differential confocal method (DDCM) is proposed …

We present a single-shot spectrally-resolved interferometry for simultaneously measuring
the film thickness and surface profile of each layer of a patterned multilayer film structure. For …

Abstract Structured Illumination Microscopy (SIM) is widely recognized as a precise and
stable technique for three-dimensional inspection. However, efficiently achieving precise …