In this study, a new type of highly sensitive fiber-optic Fabry–Perot interferometer (FFPI) is
proposed with a high sensitivity on a wide refractive index (RI) measurement range based …

A micro-grating tilt sensor based on phase diffraction grating with self-calibration capability
and direct intensity modulation is proposed. The optical tilt sensor consists of a coherent …

In this paper, we presented the double optical path length of a photonic bandgap fiber
(PBGF) gas cell. The gas sensor sensitivity can be improved by a two fold lengthening of the …

In this paper, we report the research progress of a recently developed quartz micro-electro-
mechanical system (MEMS)-based capacitive tilt sensor using bulk micromachining …

Thermal stress formed in the solder of the microelectromechanical systems (MEMS) sensor
during the reflow soldering process due to the coefficients of thermal expansion (CTE) …

This paper investigates a high-precision and wide range measurement dual-axis tilt sensor.
A method to improve the tilt sensor's range is specially put forward. With the measurement tilt …

We present a new method for stress-free microelectromechanical systems (MEMS) flip-chip
packaging. Residual stress, which is mainly generated during the reflow process, is a …

En este artículo, se presenta un sensor de inclinación de fibra óptica basado en la
modulación de intensidad, la cual se relaciona experimentalmente en función de pérdidas …