The advantages of foot-mounted inertial pedestrian position system are passive, full-
autonomous and not affected by environment. However, the disadvantage of the …

In this paper, an electromagnetic induction based resonant MEMS magnetometer used for
out-of-plane magnetic field sensing is demonstrated. The main structure (named as 4S …

Spin polarized noble gases can precess in an applied magnetic field by referring to Larmor
precession, based on which we present a novel method to calibrate magnetic coil constants …

A resonant magnetic field microsensor based on Microelectromechanical Systems (MEMS)
technology including a piezoresistive detection system has been designed, fabricated, and …

The ultrahigh sensitivity atomic spin magnetometer as the magnetic measurement sensor
has received much concern. The performance of the magnetic shielding cylinder is one of …

In the last decades magnetic field sensors have been developed and realized for analyzing
and controlling thousands of functions (Ripka, 2001), and they have become a widespread …

(57) ABSTRACT A magnetic sensor utilizes a MEMS device that has at least one vibrating
member and at least one conductive path inte gral with the vibrating member so that a …

In this paper, we propose a multiphysics-based optimization of the geometry of a
microbeam, which represents the sensing part of a Lorentz force, resonating, MEMS …

An accurate positioning and attitude computation of vehicles, robots, or even persons is of
the utmost importance and critical for the success of many operations in multiple …

This study investigates the design and fabrication of magnetic microsensors using the
commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process. The …