Low temperature (< 700° C) SiO2 and Si-rich SiO2 films: Short review

C Falcony, D Estrada-Wiese, J De Anda… - Journal of Vacuum …, 2023 - pubs.aip.org
SiO2 layers deposited at temperatures (lower than 700 C) have attracted a great deal of
attention for a large variety of applications, since they can be used for dielectric isolation, a …

Spectroscopic Properties of Si-nc in SiOx Films Using HFCVD

ZJ Hernández Simón, JA Luna López, ADH de la Luz… - Nanomaterials, 2020 - mdpi.com
In the present work, non-stoichiometric silicon oxide films (SiOx) deposited using a hot
filament chemical vapor deposition technique at short time and simple parameters of …

MIS-like structures with silicon-rich oxide films obtained by HFCVD: Their response as photodetectors

GO Mendoza Conde, JA Luna López… - Sensors, 2022 - mdpi.com
MIS-type structures composed of silicon-rich oxide (SRO), thin films deposited by hot
filament chemical vapor deposition (HFCVD), show interesting IV and It properties under …

SiOx by magnetron sputtered revisited: Tailoring the photonic properties of multilayers

A García-Valenzuela, R Alvarez, JP Espinós… - Applied Surface …, 2019 - Elsevier
Traditionally porous silicon based photonic structures have been prepared by
electrochemically etching of silicon. In this work, porous multilayers of nanocolumnar SiO x …

Embedded silicon nanoparticles as enabler of a novel cmos-compatible fully integrated silicon photonics platform

AA González-Fernández, M Aceves-Mijares… - Crystals, 2021 - mdpi.com
The historical bottleneck for truly high scale integrated photonics is the light emitter. The lack
of monolithically integrable light sources increases costs and reduces scalability. Quantum …

Study of silicon rich oxide light emitter capacitors using textured substrates by metal assisted chemical etching

O Pérez-Díaz, AA González-Fernández… - Journal of …, 2022 - Elsevier
Mono and multilayer silicon rich oxide light-emitting capacitors (SRO-LEC) were fabricated
using both polished and textured Si substrates. The textured substrate surface was treated …

[HTML][HTML] Comparison of light emitting capacitors with textured and polished silicon substrates towards the understanding of the emission mechanisms

J Alarcón-Salazar, MA Vásquez-Agustín… - Journal of …, 2018 - Elsevier
We experimentally compare the optical and electrical characteristics of Light Emitting
Capacitors (LECs) using textured and polished silicon surface. The goal of this work is …

Effect of the thermal annealing temperature on the luminescent and morphological properties of silicon rich oxide bilayer structures.

JJA Bravo, AM Sánchez, LP Huerta… - 2023 IEEE Latin …, 2023 - ieeexplore.ieee.org
This work studies the effect of the thermal annealing temperature on the optical and
morphological properties of SR O_x/SR O_y bilayer structures when the SR O_y contains a …

[HTML][HTML] Enhancing emission and conduction of light emitting capacitors by multilayered structures of silicon rich oxide

J Alarcón-Salazar, IE Zaldívar-Huerta… - Sensors and Actuators A …, 2017 - Elsevier
This work reports the morphological, electrical and luminescent characteristics of Light
Emitting Capacitors (LECs) composed by Silicon Rich Oxide (SRO) multilayers. These …

Effect of the graded silicon content in SRN/SRO multilayer structures on the Si nanocrystals and Si nanopyramids formation and their photoluminescence response

JJ Avilés Bravo, SA Cabañas Tay, L Palacios Huerta… - Materials, 2021 - mdpi.com
Two multilayer (ML) structures, composed of five layers of silicon-rich oxide (SRO) with
different Si contents and a sixth layer of silicon-rich nitride (SRN), were deposited by low …