Laser drilling in silicon carbide and silicon carbide matrix composites

DR Sun, G Wang, Y Li, Y Yu, C Shen, Y Wang - Optics & Laser …, 2024 - Elsevier
Silicon carbide (SiC) presents excellent semiconductor and physicochemical properties. The
fabrication of through-holes in SiC and SiC matrix composites is beneficial to the new …

Femtosecond laser fabrication of microchannels in transparent hard materials

Y Lu, YF Li, G Wang, Y Yu, Z Bai… - Advanced Materials …, 2023 - Wiley Online Library
The excellent characteristics of transparent hard materials such as high hardness, high
transparency, corrosion resistance, and high temperature resistance enable their …

Jellylike flexible nanocellulose SERS substrate for rapid in-situ non-invasive pesticide detection in fruits/vegetables

J Chen, M Huang, L Kong, M Lin - Carbohydrate polymers, 2019 - Elsevier
This study aimed to develop a jellylike flexible substrate based on nanocellulose decorated
with Ag nanoparticles (Ag/NC substrate) and explore its applications for rapid in-situ …

Evolution of micro/nano-structural arrays on crystalline silicon carbide by femtosecond laser ablation

R Zhang, C Huang, J Wang, S Feng, H Zhu - Materials Science in …, 2021 - Elsevier
An experimental study is conducted to investigate the multi-length scale evolution from
micro/nano-structural arrays to V-grooves by femtosecond laser-irradiations, considering the …

Application of femtosecond laser etching in the fabrication of bulk SiC accelerometer

Y Yang, Y Zhao, L Wang, Y Zhao - Journal of Materials Research and …, 2022 - Elsevier
Silicon carbide (SiC) is a promising material to fabricate MEMS accelerometers used in
extreme environments for vibration monitoring. However, with ultra-high hardness and …

Silicon carbide nano-via arrays fabricated by double-sided metal-assisted photochemical etching

Y Chen, Z Li, D Shi, S Dong, X Chen, J Gao - Materials Today …, 2023 - Elsevier
Silicon carbide (SiC) has gradually dominated the market of power semiconductor electronic
devices because of its excellent electrical properties and chemical stability. However …

Fabrication of grating structures on silicon carbide by femtosecond laser irradiation and wet etching

B Gao, T Chen, V Khuat, J Si, X Hou - Chinese Optics Letters, 2016 - opg.optica.org
A method for fabricating deep grating structures on a silicon carbide (SiC) surface by a
femtosecond laser and chemical-selective etching is developed. Periodic lines …

A combined model for formation mechanism of ripples induced by femtosecond laser on silicon carbide

Z Yan, Q Lin, G Li, Y Zhang, W Wang, X Mei - Applied Physics A, 2020 - Springer
In this article, a comparative study is performed to explore the formation mechanism of laser-
induced periodic surface structures (LIPSS) using femtosecond laser on silicon carbide …

Optimization of the femtosecond laser trepan drilling strategy on IN792 for improving hole geometrical characteristics and machining efficiency

F Zhang, S Sun, X Wang, J Wang, Y Pang… - … International Journal of …, 2023 - Springer
Drilling film cooling holes (FCHs) that meet the stringent quality standards was a challenging
task in aeroengine component manufacturing. This study aims to enhance the geometrical …

Study on morphology of high-aspect-ratio grooves fabricated by using femtosecond laser irradiation and wet etching

T Chen, A Pan, C Li, J Si, X Hou - Applied Surface Science, 2015 - Elsevier
Morphologies of high-aspect-ratio silicon grooves fabricated by using femtosecond laser
irradiation and selective chemical etching of hydrofluoric acid (HF) were studied. Oxygen …