The dynamic interaction of vehicles/bridges is an important part of the research field of the
Electromagnet Suspension (EMS) maglev train. However, multiple factors affect the …

In this research, experimental validation of deadzone compensation for a magnetic levitation
transporting organic light-emitting diode (OLED) displays system is investigated. The …

The manufacturing process of OLED displays requires a high accuracy and a highly clean
transport system because during the evaporation process, organic materials are inherently …

Maglev (Magnetic levitation) technology is an effective way for transport to move without
contacting with the ground so that it reduces friction and allows high speeds compared to …

The high-precision magnetic levitation transport system is a transport device applying the
principle of magnetic levitation. So it is preferable for manufactory process of semiconductor …

High-speed maglev is more likely to vibrate when suspended in bridge because the bridge
is not absolutely rigid and it will deform and vibrate when excited by the electro-magnetic …

Particles are main sources of defects in display manufacturing process and have to be
minimized for better productivity. The developed passive magnetic levitation (Maglev) …

분진과 수분에 취약한 OLED 증착공정에서는 고청정의 물류이송시스템 개발이 시급하다. 현재
사용 중인 롤러방식의 이송시스템은 분진발생과 마찰력과 같은 비선형적인 요인에 의해 …

The high-precision magnetic levitation transport system is a transport device applying the
principle of magnetic levitation. So it is preferable for manufactory process of semiconductor …

초 록 고청정 환경에서의 저진동, 저소음의 특징으로 동작하는 초정밀 자기부상 이송장치는
디스플레이 공정 산업 등에 활용한다. 레일 상단에는 부상 전자석과 공극 센서가 부착되어 …