Microelectromechanical systems sensors have been intensively developed utilizing various
physical concepts, such as piezoresistive, piezoelectric, and thermoresistive effects. Among …

A thermal convection based micro-electromechanical accelerometer is a relatively new kind
of acceleration sensor that does not require a solid proof mass, yielding unique benefits like …

In this study, a new technique has been proposed by numerical simulations by which
multiple physical quantities can be simultaneously measured. The sensor is a modification …

We present a one-dimensional (1D) theoretical model for the design analysis of a micro
thermal convective accelerometer (MTCA). Systematical design analysis was conducted on …

This paper proposes what we believe to be a novel linearization signal conditioning circuit
for a tri-axial micro-grating micro-opto-electro-mechanical systems (MOEMS) accelerometer …

This paper presents the design, simulation, fabrication, and experiment of a triaxial
accelerometer based on differential resonant beams and force-balanced capacitive plates …

In this paper, a new 3-axis micromachined convective accelerometer is designed using
restrictions of both 0.35 µm CMOS technology and front-side bulk micromachining (FSBM) …

In this paper, we report the details and findings of a study on tri-axis convective
accelerometer, which is designed with the closed-loop type heat source and thermal …

In this paper, we propose a hybrid CMOS and phase-change memory (PCM)-relaxation-
oscillator based circuit for temperature-sensing applications. Unlike conventional CMOS …

A new design of the three-axis thermal accelerometer with a set of temperature sensing
elements (thermistors) in the direction of each axis located on a thin-film SiO 2 membrane is …