A review on coupled bulk acoustic wave MEMS resonators
With the introduction of the working principle of coupled resonators, the coupled bulk
acoustic wave (BAW) Micro-Electro-Mechanical System (MEMS) resonators have been …
acoustic wave (BAW) Micro-Electro-Mechanical System (MEMS) resonators have been …
1 and 2-DoF AlN-on-SOI BAW Disk MEMS Resonant Sensors Operated at Contour Mode
This paper conducts a comprehensive study on 1 and 2-degree-of-freedom (DoF)
piezoelectric bulk acoustic wave (BAW) disk resonators operating in the contour extensional …
piezoelectric bulk acoustic wave (BAW) disk resonators operating in the contour extensional …
A Novel 3-DoF Mode Localized BAW Resonant Mass Sensor With High Quality Factor and Resolution
This article presents a mass sensor based on a 3-degree-of-freedom (DoF) mode localized
piezoelectric bulk acoustic wave (BAW) resonator system operating in the contour …
piezoelectric bulk acoustic wave (BAW) resonator system operating in the contour …
Mechanically coupled SOI Lamé-mode resonator-arrays: Synchronized oscillations with high quality factors of 1 million
Y Xu, JEY Lee - 2013 Joint European Frequency and Time …, 2013 - ieeexplore.ieee.org
In this work, we present the first demonstration of synchronized oscillations in an SOI
resonator array with quality factors (Qs) in the order of 10 6 through mechanical coupling …
resonator array with quality factors (Qs) in the order of 10 6 through mechanical coupling …
Gas Sensors Based on 1 & 2-Dof Piezoelectric Baw MEMS Resonators with Coated ZIF-8
This paper studies ethanol gas sensing applications for 1 and 2-degree-of-freedom (DoF)
coupled bulk acoustic wave (BAW) resonators. Zeolitic imidazolate framework-8 (ZIF-8) was …
coupled bulk acoustic wave (BAW) resonators. Zeolitic imidazolate framework-8 (ZIF-8) was …