HH Lin, CC Lin, CT Shih, WY Jang… - IEEE Electron Device …, 2023 - ieeexplore.ieee.org
In this work, we fabricate a ferroelectric tunnel junction (FTJ) device with W/MgO/HZO/TiN
structure. The effect of MgO thickness on the FTJ properties of HZO films is studied. Device …