Developments in large-scale engineering metrology since the 1978 report of Puttock are
reviewed. Advances in optical technology and fast, low-cost computation have led to wide …

This paper describes a scanning multi-probe system for measuring straightness profiles of
cylinder workpieces. The system consists of two probe-units, each having three …

This paper describes a three-probe system that can be used to measure the parallelism and
straightness of a pair of rails simultaneously. The parallelism is measured using a modified …

This paper describes a systematic method to model and compensate geometric errors of
machine tools. In order to separate geometric errors from other errors, measured errors are …

This paper presents an estimation method for five-degrees-of-freedom (5-DOF) motion
errors, which are influenced by the profiles of guide rails of an aerostatic linear motion stage …

抄録 The combined 3-point method, which combines the generalized 3-point method with
the sequential 3-point method, is described in the present paper. The combined 3-point …

Accuracy measurement in working space is crucial in the evaluation of machine tools and
3D-CMMs. Though tracking type laser interferometers are widely used in the measurements …

This paper describes a method for estimating the geometric errors of an aerostatic planar XY
stage. The method calculates two-dimensional (2D) position errors and flatness based on …

This study presents a general and systematic approach for motion error estimation of a
linear motion bearing table based on hierarchical idea. The approach is implemented in the …

A novel time-domain method, which can reconstruct straightness profile of workpiece exactly
for on-machine measurement, has successfully been developed. The proposed method is …