Electronic defects in amorphous oxide semiconductors: A review

K Ide, K Nomura, H Hosono… - physica status solidi (a), 2019 - Wiley Online Library
Amorphous oxide semiconductors (AOSs) have been commercialized since 2012 as thin‐
film transistor (TFT) backplanes in flat‐panel displays. This review first provides a brief …

Amorphous IGZO TFT with High Mobility of ∼70 cm2/(V s) via Vertical Dimension Control Using PEALD

J Sheng, TH Hong, HM Lee, KR Kim… - … applied materials & …, 2019 - ACS Publications
Amorphous InGaZnO x (a-IGZO) thin-film transistors (TFTs) are currently used in flat-panel
displays due to their beneficial properties. However, the mobility of∼ 10 cm2/(V s) for the a …

Influence of deposition condition on electrical properties of a-IGZO films deposited by plasma-enhanced reactive sputtering

K Takenaka, M Endo, G Uchida, A Ebe… - Journal of Alloys and …, 2019 - Elsevier
The effects of sputtered atom flux on the electrical properties of a-IGZO films before and after
thermal annealing were examined by varying the fluxes of sputtered atoms at the substrate …

Study of the correlation between the amorphous indium-gallium-zinc oxide film quality and the thin-film transistor performance

S Hu, K Lu, H Ning, R Yao, Y Gong, Z Pan, C Guo… - Nanomaterials, 2021 - mdpi.com
In this work, we performed a systematic study of the physical properties of amorphous
Indium–Gallium–Zinc Oxide (a-IGZO) films prepared under various deposition pressures, O …

Low-temperature (150° C) activation of Ar+ O2+ H2-sputtered In–Ga–Zn–O for thin-film transistors

SGM Aman, Y Magari, K Shimpo, Y Hirota… - Applied Physics …, 2018 - iopscience.iop.org
Abstract In–Ga–Zn–O (IGZO) sputtering in an Ar, O 2, and H 2 atmosphere followed by
annealing represents an effective method for defect reduction of the resulting films. The …

Facile routes to enhance doping efficiency using nanocomposite structures for high-mobility and stable PEALD-ITGO TFTs

DG Kim, M Kim, DH Lee, S Lee, J Kho, Y Kim… - Applied Surface …, 2024 - Elsevier
Abstract In–Sn–Ga–O (ITGO) thin-film transistors (TFTs) fabricated by atomic layer
deposition (ALD) are promising candidates for widespread semiconductor applications …

Flexible IGZO Schottky diodes on paper

J Kaczmarski, MA Borysiewicz… - Semiconductor …, 2017 - iopscience.iop.org
With the development of novel device applications, eg in the field of robust and recyclable
paper electronics, came an increased demand for the understanding and control of IGZO …

[HTML][HTML] Effect of sputtering working pressure on the reliability and performance of amorphous indium gallium zinc oxide thin film transistors

T Lee, JS Park, S Oh - AIP Advances, 2024 - pubs.aip.org
In this study, the reliability and electrical properties of indium gallium zinc oxide (IGZO) thin
film transistors (TFTs) are investigated when the working pressure of the sputtering system is …

Transition Metal‐Doped Amorphous Oxide Semiconductor Thin‐Film Phosphor, Chromium‐Doped Amorphous Gallium Oxide

K Ide, Y Futakado, N Watanabe, J Kim… - … status solidi (a), 2019 - Wiley Online Library
Transition metal (TM)‐doped amorphous gallium oxide (a‐GO: TMx) is studied as an
inorganic thin‐film phosphor. Cr is selected as an emission center based on preliminary …

The evolution of nanoscale pores with post-annealing and the structure-electrical property correlation in vanadium oxide thin films

E Dirican, AM Yağcı, MY Tanrıkulu, RM Öksüzoğlu - Thin Solid Films, 2022 - Elsevier
Abstract Structure-property correlation in vanadium oxide nanoscale thin films used in
uncooled thermal detectors is a crucial question for device performance. The purpose of this …