The semiconductor industry continues to produce ever smaller devices that are ever more
complex in shape and contain ever more types of materials. The ultimate sizes and …

Optical metrology is one of the key technologies in today's manufacturing industry. In this
article, we provide an insight into optical measurement technologies for precision …

Block-copolymers self-assemble into diverse morphologies, where nanoscale order can be
finely tuned via block architecture and processing conditions. However, the ultimate usage …

Conspectus Electrocatalysts play an important role in catalyzing the kinetics for oxygen
reduction and oxygen evolution reactions for many air-based energy storage and …

The semiconductor industry is exploring new metrology techniques capable of meeting the
future requirement to characterize three-dimensional structure where the critical dimensions …

摘要在线测量检测技术与装备是保证集成电路(IC) 制造质量和良率的唯一有效技术手段, 在IC
制造过程中必须对IC 纳米结构的关键尺寸, 套刻误差, 以及缺陷等进行快速, 非破坏 …

Nanoelectronics is changing the way the world communicates, and is transforming our daily
lives. Continuing Moore's law and miniaturization of low-power semiconductor chips with …

Resonant soft X-ray scattering (R-SoXS) has proven to be a highly useful technique for
studying the morphology of soft matter thin films due to the large intrinsic contrast between …

High aspect ratio (HAR) structures found in three-dimensional nand memory structures have
unique process control challenges. The etch used to fabricate channel holes several …

High-volume fabrication of nanostructures requires nondestructive metrologies capable of
measuring not only the pattern size but also the pattern shape profile. Measurement tool …