Systematic Study of the SiOx Film with Different Stoichiometry by Plasma-Enhanced Atomic Layer Deposition and Its Application in SiOx/SiO2 Super-Lattice

HP Ma, JH Yang, JG Yang, LY Zhu, W Huang, GJ Yuan… - Nanomaterials, 2019 - mdpi.com
Atomic scale control of the thickness of thin film makes atomic layer deposition highly
advantageous in the preparation of high quality super-lattices. However, precisely …

Analysis of the conduction mechanisms responsible for multilevel bipolar resistive switching of SiO2/Si multilayer structures

KE González-Flores, P Horley, SA Cabañas-Tay… - Superlattices and …, 2020 - Elsevier
We report on the bipolar resistive switching behavior of a SiO 2/Si multilayer (ML) structure
measured without current compliance for non-volatile memory applications. The SiO 2/Si ML …

Resistive switching control for conductive Si-nanocrystals embedded in Si/SiO2 multilayers

KE González–Flores, B Palacios-Márquez… - …, 2018 - iopscience.iop.org
In this paper, we report on the enhanced control of resistive switching in multilayer Si/SiO 2
structures, which permit the formation of Si nanocrystals with a typical size of 5.88 nm and …

Size confinement of Si nanocrystals in multinanolayer structures

R Limpens, A Lesage, M Fujii, T Gregorkiewicz - Scientific Reports, 2015 - nature.com
Si nanocrystals (NCs) are often prepared by thermal annealing of multiple stacks of
alternating sub-stoichiometric SiO x and SiO2 nanolayers. It is frequently claimed that in …

Silicon excess and thermal annealing effects on structural and optical properties of co-sputtered SRO films

A Coyopol, MA Cardona, TD Becerril, LL Jimenez… - Journal of …, 2016 - Elsevier
In this work, the structural and optical properties of co-sputtered SRO (Silicon Rich Oxide)
films are studied as a function of the annealing temperature and the change in the Si …

Enhanced photoconductivity of embedded SiGe nanoparticles by hydrogenation

MT Sultan, JT Gudmundsson, A Manolescu… - Applied Surface …, 2019 - Elsevier
We investigate the effect of room-temperature hydrogen-plasma treatment on the
photoconductivity of SiGe nanoparticles sandwiched within SiO 2 layers. An increase in …

Interplay of bimolecular and Auger recombination in photoexcited carrier dynamics in silicon nanocrystal/silicon dioxide superlattices

T Chlouba, F Trojánek, J Laube, D Hiller, S Gutsch… - Scientific Reports, 2018 - nature.com
We report results of investigating carrier recombination in silicon nanocrystal/silicon dioxide
superlattices. The superlattices prepared by nitrogen-free plasma enhanced chemical …

Effects of thermal annealing on the distribution of boron and phosphorus in pin structured silicon nanocrystals embedded in silicon dioxide

K Nomoto, XY Cui, A Breen, AV Ceguerra… - …, 2021 - iopscience.iop.org
Thermal annealing temperature and time dictate the microstructure of semiconductor
materials such as silicon nanocrystals (Si NCs). Herein, atom probe tomography (APT) and …

Effect of Si3N4‐Mediated Inversion Layer on the Electroluminescence Properties of Silicon Nanocrystal Superlattices

J López‐Vidrier, S Gutsch, O Blázquez… - Advanced Electronic …, 2018 - Wiley Online Library
The achievement of an efficient all‐Si electrically‐pumped light emitter is a major milestone
in present optoelectronics still to be fulfilled. Silicon nanocrystals (Si NCs) are an attractive …

Microstructure analysis of silicon nanocrystals formed from silicon rich oxide with high excess silicon: Annealing and doping effects

K Nomoto, TCJ Yang, AV Ceguerra, T Zhang… - Journal of Applied …, 2017 - pubs.aip.org
Thin films consisting of silicon nanocrystals fabricated by high silicon content in silicon rich
oxide show unique properties of decreasing resistivity and increasing light absorption while …