Electrostatic pull-in instability in MEMS/NEMS: A review

WM Zhang, H Yan, ZK Peng, G Meng - Sensors and Actuators A: Physical, 2014 - Elsevier
Pull-in instability as an inherently nonlinear and crucial effect continues to become
increasingly important for the design of electrostatic MEMS and NEMS devices and ever …

Lyapunov exponents as a criterion for the dynamic pull-in instability of electrostatically actuated microstructures

S Krylov - International Journal of Non-Linear Mechanics, 2007 - Elsevier
The dynamic pull-in instability of double clamped microscale beams actuated by a suddenly
applied distributed electrostatic force and subjected to non-linear squeeze film damping is …

On the dynamic response of electrostatic MEMS switches

V Leus, D Elata - Journal of Microelectromechanical Systems, 2008 - ieeexplore.ieee.org
The undamped dynamic response of electrostatic MEMS switches that are driven by a step-
function voltage is investigated. A systematic analysis using energy methods is presented …

Pull-in dynamics of two MEMS parallel-plate structures for acceleration measurement

Z Ma, X Jin, Y Guo, T Zhang, Y Jin… - IEEE Sensors …, 2021 - ieeexplore.ieee.org
This paper investigates the pull-in dynamics of single-sided and double-sided parallel-plate
(SSPP and DSPP) structures employed in MEMS devices for acceleration measurement. A …

Lateral pull-in instability of electrostatic MEMS transducers employing repulsive force

M Daeichin, R Miles, S Towfighian - Nonlinear Dynamics, 2020 - Springer
We report on the lateral pull-in in capacitive MEMS transducers that employ a repulsive
electrostatic force. The moving element in this system undergoes motion in two dimensions …

Dynamical characteristics of an electrically actuated microbeam under the effects of squeeze-film and thermoelastic damping

P Belardinelli, M Brocchini, L Demeio… - International Journal of …, 2013 - Elsevier
The static and dynamic behavior of a MEMS subjected to thermoelastic and squeeze-film
effects is investigated. We analyse the various engineering aspects which interact in a …

The dynamic pull-in instability and snap-through behavior of initially curved microbeams

MM Zand - Mechanics of Advanced Materials and Structures, 2012 - Taylor & Francis
In this study, dynamic pull-in instability and snap-through buckling of initially curved
microbeams are investigated. The microbeams are actuated by suddenly applied …

Dynamic simulation of a peristaltic micropump considering coupled fluid flow and structural motion

Q Lin, B Yang, J Xie, YC Tai - Journal of micromechanics and …, 2006 - iopscience.iop.org
This paper presents lumped-parameter simulation of dynamic characteristics of peristaltic
micropumps. The pump consists of three pumping cells connected in series, each of which is …

Pull-in-based μg-resolution accelerometer: Characterization and noise analysis

RA Dias, E Cretu, R Wolffenbuttel, LA Rocha - Sensors and Actuators A …, 2011 - Elsevier
The pull-in time (tpi) of electrostatically actuated parallel-plate microstructures enables the
realization of a high-sensitivity accelerometer that uses time measurement as the …

Characterization of coupled-domain multi-layer microplates in pull-in phenomenon, vibrations and dynamics

MM Zand, MT Ahmadian - international journal of mechanical sciences, 2007 - Elsevier
This paper presents a model to analyze pull-in phenomenon, vibrational behavior and
dynamics of multi-layer microplates using coupled finite element and finite difference …