Tutorial: Reactive high power impulse magnetron sputtering (R-HiPIMS)

A Anders - Journal of Applied Physics, 2017 - pubs.aip.org
High Power Impulse Magnetron Sputtering (HiPIMS) is a coating technology that combines
magnetron sputtering with pulsed power concepts. By applying power in pulses of high …

[HTML][HTML] Paradigm shift in thin-film growth by magnetron sputtering: From gas-ion to metal-ion irradiation of the growing film

G Greczynski, I Petrov, JE Greene… - Journal of Vacuum …, 2019 - pubs.aip.org
Ion irradiation is a key tool for controlling the nanostructure, phase content, and physical
properties of refractory ceramic thin films grown at low temperatures by magnetron …

Foundations of physical vapor deposition with plasma assistance

JT Gudmundsson, A Anders… - … Sources Science and …, 2022 - iopscience.iop.org
Physical vapor deposition (PVD) refers to the removal of atoms from a solid or a liquid by
physical means, followed by deposition of those atoms on a nearby surface to form a thin …

[HTML][HTML] Plasma potential of a moving ionization zone in DC magnetron sputtering

M Panjan, A Anders - Journal of Applied Physics, 2017 - pubs.aip.org
Using movable emissive and floating probes, we determined the plasma and floating
potentials of an ionization zone (spoke) in a direct current magnetron sputtering discharge …

Metal-ion subplantation: A game changer for controlling nanostructure and phase formation during film growth by physical vapor deposition

G Greczynski, S Mráz, JM Schneider… - Journal of Applied …, 2020 - pubs.aip.org
Up until recently, thin film growth by magnetron sputtering relied on enhancing adatom
mobility in the surface region by gas-ion irradiation to obtain dense layers at low deposition …

Spokes in high power impulse magnetron sputtering plasmas

A Hecimovic, A Von Keudell - Journal of Physics D: Applied …, 2018 - iopscience.iop.org
High-power impulse magnetron sputtering is a deposition technique where a metal
magnetron target is sputtered in a high-density plasma to synthesise thin layers with …

[HTML][HTML] Angular distribution of titanium ions and neutrals in high-power impulse magnetron sputtering discharges

M Renner, J Fischer, H Hajihoseini… - Journal of Vacuum …, 2023 - pubs.aip.org
The angular dependence of the deposition rates due to ions and neutrals in high-power
impulse magnetron sputtering (HiPIMS) discharges with a titanium target were determined …

Electron dynamics in radio frequency magnetron sputtering argon discharges with a dielectric target

B Zheng, Y Fu, K Wang, T Schuelke… - … Sources Science and …, 2021 - iopscience.iop.org
We demonstrate a self-consistent and complete description of electron dynamics in a typical
electropositive radio frequency magnetron sputtering (RFMS) argon discharge with a …

Energy Distribution of Sputtered Atoms Explored by SRIM Simulations

N Mahne, M Čekada, M Panjan - Coatings, 2023 - mdpi.com
The energy of the sputtered atoms is important to control the microstructure and physical
properties of thin films. In this work, we used the SRIM program to simulate the energy of …

A review on the application of bioinformatics tools in food microbiome studies

R Chelliah, E Banan-MwineDaliri, I Khan… - Briefings in …, 2022 - academic.oup.com
There is currently a transformed interest toward understanding the impact of fermentation on
functional food development due to growing consumer interest on modified health benefits …