Ion irradiation is a key tool for controlling the nanostructure, phase content, and physical properties of refractory ceramic thin films grown at low temperatures by magnetron …
Physical vapor deposition (PVD) refers to the removal of atoms from a solid or a liquid by physical means, followed by deposition of those atoms on a nearby surface to form a thin …
M Panjan, A Anders - Journal of Applied Physics, 2017 - pubs.aip.org
Using movable emissive and floating probes, we determined the plasma and floating potentials of an ionization zone (spoke) in a direct current magnetron sputtering discharge …
Up until recently, thin film growth by magnetron sputtering relied on enhancing adatom mobility in the surface region by gas-ion irradiation to obtain dense layers at low deposition …
High-power impulse magnetron sputtering is a deposition technique where a metal magnetron target is sputtered in a high-density plasma to synthesise thin layers with …
M Renner, J Fischer, H Hajihoseini… - Journal of Vacuum …, 2023 - pubs.aip.org
The angular dependence of the deposition rates due to ions and neutrals in high-power impulse magnetron sputtering (HiPIMS) discharges with a titanium target were determined …
We demonstrate a self-consistent and complete description of electron dynamics in a typical electropositive radio frequency magnetron sputtering (RFMS) argon discharge with a …
N Mahne, M Čekada, M Panjan - Coatings, 2023 - mdpi.com
The energy of the sputtered atoms is important to control the microstructure and physical properties of thin films. In this work, we used the SRIM program to simulate the energy of …
R Chelliah, E Banan-MwineDaliri, I Khan… - Briefings in …, 2022 - academic.oup.com
There is currently a transformed interest toward understanding the impact of fermentation on functional food development due to growing consumer interest on modified health benefits …