Long range, high precision, XY stages have a multitude of applications in scanning probe microscopy, lithography, micro-AM, wafer inspection and other fields. However, finding cost …
Three degree of freedom spherical flexure joints are typically limited to small deflections because of their strong loss of stiffness in support directions when deflected. In this paper, a …
G Hao, X He, S Awtar - Mechanism and Machine Theory, 2019 - Elsevier
This paper presents the design and analytical model of a compact flexure mechanism with a general beam shape, which can offer desirable single-axis translational motion capabilities …
This paper presents in-plane electrostatic comb-drive actuators with stroke as large as 245 μm that is achieved by employing a novel clamped paired double parallelogram (C-DP-DP) …
We present an improved flexure linkage design for removing underconstraint in a double parallelogram (DP) linear flexural mechanism. This new linkage alleviates many of the …
Micro and nanoscale additive manufacturing methods employing metals and ceramics have many promising applications in the aerospace, medical device, and electronics industries …
A conventional linear guiding mechanism refers to the slide rail guides composed of multiple assemble parts. These guiding mechanisms suffer from many adverse effects, including …
M Olfatnia, L Cui, P Chopra… - Journal of Micromechanics …, 2013 - iopscience.iop.org
This paper presents a micro XY stage that employs electrostatic comb-drive actuators and achieves a bi-directional displacement range greater than 225 µm per motion axis. The …
G Hao, H Li, X He, X Kong - Frontiers of Mechanical Engineering, 2014 - Springer
Compliant translational joints (CTJs) have been extensively used in precision engineering and microelectromechanical systems (MEMS). There is an increasing need for designing …