MEMS for nanopositioning: Design and applications

M Maroufi, AG Fowler… - Journal of …, 2017 - ieeexplore.ieee.org
Nanopositioners are high-precision mechatronic devices that are capable of generating
mechanical motion with nanometer or sub-nanometer resolution. With this motion typically …

Design and characterization of a two-axis, flexure-based nanopositioning stage with 50 mm travel and reduced higher order modes

NK Roy, MA Cullinan - Precision Engineering, 2018 - Elsevier
Long range, high precision, XY stages have a multitude of applications in scanning probe
microscopy, lithography, micro-AM, wafer inspection and other fields. However, finding cost …

Large stroke high off-axis stiffness three degree of freedom spherical flexure joint

M Naves, R Aarts, DM Brouwer - Precision engineering, 2019 - Elsevier
Three degree of freedom spherical flexure joints are typically limited to small deflections
because of their strong loss of stiffness in support directions when deflected. In this paper, a …

Design and analytical model of a compact flexure mechanism for translational motion

G Hao, X He, S Awtar - Mechanism and Machine Theory, 2019 - Elsevier
This paper presents the design and analytical model of a compact flexure mechanism with a
general beam shape, which can offer desirable single-axis translational motion capabilities …

Large stroke electrostatic comb-drive actuators enabled by a novel flexure mechanism

M Olfatnia, S Sood, JJ Gorman… - Journal of …, 2012 - ieeexplore.ieee.org
This paper presents in-plane electrostatic comb-drive actuators with stroke as large as 245
μm that is achieved by employing a novel clamped paired double parallelogram (C-DP-DP) …

Eliminating underconstraint in double parallelogram flexure mechanisms

RM Panas, JB Hopkins - Journal of …, 2015 - asmedigitalcollection.asme.org
We present an improved flexure linkage design for removing underconstraint in a double
parallelogram (DP) linear flexural mechanism. This new linkage alleviates many of the …

Design of a micro-scale selective laser sintering system

NK Roy - 2018 - repositories.lib.utexas.edu
Micro and nanoscale additive manufacturing methods employing metals and ceramics have
many promising applications in the aerospace, medical device, and electronics industries …

Design of a Cylindrical Compliant Linear Guide with Decoupling Parallelogram Mechanisms

T Liu, G Hao - Micromachines, 2022 - mdpi.com
A conventional linear guiding mechanism refers to the slide rail guides composed of multiple
assemble parts. These guiding mechanisms suffer from many adverse effects, including …

Large range dual-axis micro-stage driven by electrostatic comb-drive actuators

M Olfatnia, L Cui, P Chopra… - Journal of Micromechanics …, 2013 - iopscience.iop.org
This paper presents a micro XY stage that employs electrostatic comb-drive actuators and
achieves a bi-directional displacement range greater than 225 µm per motion axis. The …

Conceptual design of compliant translational joints for high-precision applications

G Hao, H Li, X He, X Kong - Frontiers of Mechanical Engineering, 2014 - Springer
Compliant translational joints (CTJs) have been extensively used in precision engineering
and microelectromechanical systems (MEMS). There is an increasing need for designing …