Invited review article: High-speed flexure-guided nanopositioning: Mechanical design and control issues

YK Yong, SOR Moheimani, BJ Kenton… - Review of scientific …, 2012 - pubs.aip.org
Recent interest in high-speed scanning probe microscopy for high-throughput applications
including video-rate atomic force microscopy and probe-based nanofabrication has sparked …

Modeling and compensation of asymmetric hysteresis nonlinearity for piezoceramic actuators with a modified Prandtl–Ishlinskii model

GY Gu, LM Zhu, CY Su - IEEE Transactions on Industrial …, 2013 - ieeexplore.ieee.org
This paper presents a modified Prandtl-Ishlinskii (PI)(MPI) model for the asymmetric
hysteresis description and compensation of piezoelectric actuators. Considering the fact that …

High-speed tracking of a nanopositioning stage using modified repetitive control

CX Li, GY Gu, MJ Yang, LM Zhu - IEEE Transactions on …, 2015 - ieeexplore.ieee.org
In this paper, a modified repetitive control (MRC) based approach is developed for high-
speed tracking of nanopositioning stages. First, the hysteresis nonlinearity is decomposed …

Improvement in the imaging performance of atomic force microscopy: A survey

MS Rana, HR Pota, IR Petersen - IEEE Transactions on …, 2016 - ieeexplore.ieee.org
Nanotechnology is the branch of science which deals with the manipulation of matters at an
extremely high resolution down to the atomic level. In recent years, atomic force microscopy …

A survey of methods used to control piezoelectric tube scanners in high‐speed AFM imaging

MS Rana, HR Pota, IR Petersen - Asian Journal of Control, 2018 - Wiley Online Library
In most nanotechnology applications, speed and precision are important requirements for
obtaining good topographical maps of material surfaces using atomic force microscopes …

Development and control of a two DOF linear–angular precision positioning stage

L Clark, B Shirinzadeh, U Bhagat, J Smith, Y Zhong - Mechatronics, 2015 - Elsevier
This paper presents the mechanical design, optimisation and tracking control of a flexure-
based positioning stage to generate coupled linear and angular motions. The mechanism …

Modeling and compensating the dynamic hysteresis of piezoelectric actuators via a modified rate-dependent Prandtl–Ishlinskii model

MJ Yang, CX Li, GY Gu, LM Zhu - Smart Materials and Structures, 2015 - iopscience.iop.org
This paper presents a modified rate-dependent Prandtl–Ishlinskii (MRPI) model for the
description and compensation of the rate-dependent asymmetric hysteresis in piezoelectric …

Periodic-disturbance observer using spectrum-selection filtering scheme for cross-coupling suppression in atomic force microscopy

L Li, WW Huang, X Wang, YL Chen… - IEEE Transactions on …, 2022 - ieeexplore.ieee.org
Repetitive disturbances exist widely within the automation systems, which is one of the
major issues that hinder the achievement of precision operations. Dedicated to mitigating …

High-speed AFM imaging via iterative learning-based model predictive control

S Xie, J Ren - Mechatronics, 2019 - Elsevier
Atomic force microscopy (AFM) imaging has been broadly used for material topography
characterization and observation of dynamic material morphology revolution. However …

Design and control for high-speed nanopositioning: serial-kinematic nanopositioners and repetitive control for nanofabrication

Y Shan, KK Leang - IEEE Control Systems Magazine, 2013 - ieeexplore.ieee.org
This article focuses on the design and control of nanopo-sitioning systems (nanoposi-
tioners) that operate mostly in a repetitive fashion. In addition to accuracy, speed is also a …