Low‐Temperature Nanosecond Laser Process of HZO‐IGZO FeFETs toward Monolithic 3D System on Chip Integration

D Kim, H Jeong, G Pyo, SJ Heo, S Baik… - Advanced …, 2024 - Wiley Online Library
Ferroelectric field‐effect transistors (FeFETs) are increasingly important for in‐memory
computing and monolithic 3D (M3D) integration in system‐on‐chip (SoC) applications …

[HTML][HTML] Optimal Process Design for Wake-Up Free Hf0.5Zr0.5O2 Ferroelectric Capacitors: Toward Low-Power Devices with Enhanced Ferroelectric Performance

H Wang, J Qi, X Xie, Z Liu, W Wu, C Lee - Electronics, 2024 - mdpi.com
Ferroelectric hafnium and zirconium oxides have recently garnered significant attention due
to their potential applications in in-memory computing. In this study, we present an optimized …