Enhancing semiconductor device performance using ordered dopant arrays

T Shinada, S Okamoto, T Kobayashi, I Ohdomari - nature, 2005 - nature.com
As the size of semiconductor devices continues to shrink, the normally random distribution of
the individual dopant atoms within the semiconductor becomes a critical factor in …

Process-variation effect, metal-gate work-function fluctuation, and random-dopant fluctuation in emerging CMOS technologies

Y Li, CH Hwang, TY Li, MH Han - IEEE Transactions on …, 2009 - ieeexplore.ieee.org
This paper, for the first time, estimates the influences of the intrinsic-parameter fluctuations
consisting of metal-gate work-function fluctuation (WKF), process-variation effect (PVE), and …

Random-dopant-induced variability in nano-CMOS devices and digital circuits

Y Li, CH Hwang, TY Li - IEEE Transactions on Electron Devices, 2009 - ieeexplore.ieee.org
The impact of the number and position of discrete dopants on device characteristics is
crucial in determining the transient behavior of nanoscale circuits. An experimentally …

Simulating the electronic properties of semiconductor nanostructures using multiband k· p models

O Marquardt - Computational Materials Science, 2021 - Elsevier
The eight-band k· p formalism has been successfully applied to compute the electronic
properties of a wide range of semiconductor nanostructures in the past and can be …

Doping of silicon by phosphorus end-terminated polymers: drive-in and activation of dopants

M Perego, F Caruso, G Seguini, E Arduca… - Journal of Materials …, 2020 - pubs.rsc.org
An effective doping technology for the precise control of P atom injection and activation into
a semiconductor substrate is presented. Polystyrene polymers with a narrow molecular …

Vertically stacked nanowire MOSFETs for sub-10nm nodes: Advanced topography, device, variability, and reliability simulations

M Karner, O Baumgartner, Z Stanojević… - 2016 IEEE …, 2016 - ieeexplore.ieee.org
Using an advanced simulation framework we analyze a recent sub-10 nm technology
demonstration based on stacked nanowire transistors (NW-FETs). The study encompasses …

Discrete-dopant-induced characteristic fluctuations in 16nm multiple-gate silicon-on-insulator devices

Y Li, CH Hwang - Journal of Applied Physics, 2007 - pubs.aip.org
The impact of the number and position of discrete dopants on device characteristics is
crucial in determining the behavior of nanoscale semiconductor devices. This study explores …

Fundamental Aspects of Semiconductor Device Modeling Associated With Discrete Impurities: Nonequilibrium Green's Function Scheme

N Sano - IEEE Transactions on Electron Devices, 2024 - ieeexplore.ieee.org
A new theoretical framework for the nonequilibrium Green's function (NEGF) scheme is
presented to account for the discrete nature of impurities doped in semiconductors. Since …

Device modeling and simulations toward sub-10 nm semiconductor devices

N Sano, A Hiroki, K Matsuzawa - IEEE transactions on …, 2002 - ieeexplore.ieee.org
This paper overviews the fundamental problems encountered in device modeling and
simulations of sub-10 nm Si metal-oxide-semiconductor field-effect-transistors (MOSFETs) …

Simulation of characteristic variation in 16 nm gate FinFET devices due to intrinsic parameter fluctuations

Y Li, CH Hwang, MH Han - Nanotechnology, 2010 - iopscience.iop.org
High-κ/metal-gate and vertical channel transistors are well-known solutions to continue the
device scaling. This work extensively explores the physics and mechanism of the intrinsic …