Quality factor (Q) is an important property of micro-and nano-electromechanical (MEM/NEM)
resonators that underlie timing references, frequency sources, atomic force microscopes …

The implementation of electrostatic microactuators is one of the most popular technical
solutions in the field of micropositioning due to their versatility and variety of possible …

The nonlinear vibration of cantilever nickel microbeams with thickness in micron level is
investigated through experiment and theory. A non-contact dynamic vibration measurement …

This study presents a thorough theoretical and experimental investigation on the nonlinear
damping of in-plane micromachined electromechanical resonators. More specifically …

This work describes a novel micromechanical structure capable of producing out-of-plane
motion from in-plane forces generated by electrostatic microelectromechanical system …

This paper describes a tunable MEMS electrostatic accelerometer that uses a repulsive
electrode configuration so that the design is not hampered by capacitive pull-in instability …

In this study, the feasibility of obtaining electrical read-out data from a capacitive MEMS
accelerometer that employs repulsive electrode configuration is demonstrated. This …

This paper proposes a MEMS resonant pressure sensor through implementing an out-of-
plane repulsive (levitation) force to enhance the sensor detection threshold and …

We report on the architecture and operational principle of a resonant cantilever-type
displacement sensor. The device is actuated electrostatically by a side electrode that is …

This letter demonstrates the linear dynamic range enhancement of a mode-localized
microelectromechanical systems sensor based on two weakly coupled cantilevers under …