Pull-in instability as an inherently nonlinear and crucial effect continues to become
increasingly important for the design of electrostatic MEMS and NEMS devices and ever …

The dynamics of suspended two-dimensional (2D) materials has received increasing
attention during the last decade, yielding new techniques to study and interpret the physics …

This paper presents a comprehensive review of the reliability issues hampering capacitive
RF MEMS switches in their development toward commercialization. Dielectric charging and …

Due to their high isolation, low insertion loss, high linearity, and low power consumption,
microelectromechanical systems (MEMS) switches have drawn much attention from …

After decades of improving semiconductor-device reliability, dielectric failure rates resulting
from surface-charge accumulation, dielectric breakdown, and charge injection have been …

Surface roughness seriously affects the electromagnetic performance of capacitive radio
frequency (RF) micro-electromechanical system (MEMS) switches. This review presents the …

RF microelectromechanical systems (MEMS) capacitive switches for two different dielectrics,
aluminum nitride (AlN) and silicon nitride (Si_3N_4), are presented. The switches have been …

In this paper, we develop a physics-based theoretical modeling framework to predict the
device lifetime defined by the dominant degradation mechanisms of RF …

This paper investigates the effects of dielectric charge on resonant frequency in thermally
oxidized silicon resonators hermetically encapsulated using¿ epi-seal.¿ SiO 2 coatings are …

Polymers are ever more widely and more prominently used in microelectromechanical
systems. They provide significant added value to the existing silicon-based technologies …