Unequal areas of the powered and grounded electrodes in single-frequency capacitively
coupled plasmas (CCPs) are well-known to generate a DC self-bias voltage and an …

The wide range of applications of cold plasmas originates from their special characteristic of
being a physical system out of thermodynamic equilibrium. This property enhances its …

The influence of a uniform magnetic field parallel to the electrodes on radio frequency
capacitively coupled oxygen discharges driven at 13.56 MHz at a pressure of 100 mTorr is …

The electrical asymmetry effect allows control of the discharge symmetry, the DC self-bias,
and charged particle energy distribution functions electrically by driving a capacitive radio …

By applying the asymmetric magnetic field to a discharge, the dc self-bias and asymmetric
plasma response can be generated even in a geometrically and electrically symmetric …

The electron dynamics and the mechanisms of power absorption in radio-frequency (RF)
driven, magnetically enhanced capacitively coupled plasmas at low pressure are …

In magnetized capacitively coupled radio-frequency (RF) discharges operated at low
pressure the influence of the magnetic flux density on discharge properties has been studied …

Magnetical asymmetric effect (MAE) in a geometrically and electrically symmetric
capacitively coupled plasma is investigated by a one‐dimensional implicit Particle‐in …

The effect of various structured (non-planar) electrode topologies, eg rectangular, rounded
and triangular trenches, on the electron heating dynamics and ion density profile in …

Previous studies in low pressure magnetized capacitively coupled radio frequency (RF)
plasmas operated in argon with optimized geometric reactor symmetry have shown that the …