Micro and nanoelectromechanical systems M/NEMS have been extensively investigated
and exploited in the past few decades for various applications and for probing fundamental …

This paper is a review of the remarkable progress that has been made during the past few
decades in design, modeling, and fabrication of micromachined resonators. Although micro …

This review summarizes the reported MEMS resonators integrated monolithically in CMOS
technology and their main applications as oscillator circuits in timing applications and in …

This work proposes a novel electrostatic mechanically coupled narrowband filter based on
width extensional mode (WEM) resonators. Rectangle plate WEM resonators have the …

We propose a novel filter coupling scheme, which combines the merits of mechanically and
electrically coupled methods to enable a well-defined narrow bandwidth and a decent …

Abstract Introduction and Purpose Nonlinear modal coupling via internal resonances and
parametric excitation in MEMS resonators has been widely used to improve the functionality …

We present the fabrication, operation, and CMOS integration of arrays of suspended silicon
nanowires (SiNWs). The functional structures are obtained by a top–down fabrication …

We study the dynamics of a resonantly driven nonlinear resonator (primary) that is
nonlinearly coupled to a non-resonantly driven linear resonator (secondary) with a relatively …

This work presents a novel filter scheme which combines both electrical and mechanical
coupling mechanisms implemented in a CMOS-MEMS filter to simultaneously attain small …

This work presents a novel radio frequency (RF) narrowband Si micro-electro-mechanical
systems (MEMS) filter based on capacitively transduced slotted width extensional mode …