A method for fabricating light emitting diode (LEDs) comprises providing a plurality of LEDs
on a substrate wafer, each of which has an n-type and p-type layer of Group-III nitride …

US PATENT DOCUMENTS A display includes an array of light modulators that de? ne a
display plane, a light guide and front-and rear-facing re? ec 4967943 A 1/1978 Pen?' tive …

In one embodiment, the invention provides a method for fabricating a
microelectromechanical systems device. The method comprises fabricating a first layer …

An optical interference display panel is disclosed that has a substrate, an optical
interference reflection structure, and an opaque protection structure. The optical interference …

A hydrophobic layer covers the cavity-side surface of the bottom electrode of the
interferometric modulation pixel. Consequently, the hydrophobic layer prohibits the …

(57) ABSTRACT A structure of a micro electro mechanical system and a manufacturing
method are provided, the structure and manu facturing method is adapted for an optical …

US6849471B2 - Barrier layers for microelectromechanical systems - Google Patents
US6849471B2 - Barrier layers for microelectromechanical systems - Google Patents Barrier …

OO Assistant Examiner Jerry Fang Related US Application Dat e pplication Uata(74)
Attorney, Agent, or Firm Knobbe Martens Olson & (60) Provisional application No …

A first electrode and a sacrificial layer are sequentially formed on a substrate, and then first
openings for forming supports inside are formed in the first electrode and the sacrificial layer …

A method for making a spatial light modulator is disclosed, that comprises forming an array
of micromirrors each having a hinge and a micromirror plate held via the hinge on a …