Transition of conduction mechanism from band to variable-range hopping conduction due to Al doping in heavily Al-doped 4H-SiC epilayers

H Matsuura, A Takeshita, T Imamura… - Japanese Journal of …, 2019 - iopscience.iop.org
We investigate the transition of the conduction mechanism from band and nearest-neighbor
hopping (NNH) conduction to variable-range hopping (VRH) conduction in heavily Al-doped …

Dependence of conduction mechanisms in heavily Al-doped 4H-SiC epilayers on Al concentration

H Matsuura, A Takeshita, T Imamura… - Applied Physics …, 2018 - iopscience.iop.org
To reduce the resistivity of heavily Al-doped 4H-SiC epilayers, the conduction mechanisms
were investigated for Al concentrations (C Al) between 2.4× 10 19 and 4.7× 10 20 cm− 3 and …

Negative Hall Factor of Acceptor Impurity Hopping Conduction in p-Type 4H-SiC

Y Kajikawa - Journal of Electronic Materials, 2021 - Springer
Experimental data obtained from temperature-dependent Hall-effect measurements on Al-
doped p-type 4H-SiC samples, which exhibit an anomalous sign reversal of the Hall …

Size effect on high temperature variable range hopping in Al+ implanted 4H-SiC

A Parisini, A Parisini, R Nipoti - Journal of Physics: Condensed …, 2016 - iopscience.iop.org
The hole transport properties of heavily doped 4H-SiC (Al) layers with Al implanted
concentrations of 3× 10 20 and 5× 10 20 cm− 3 and annealed in the temperature range …

Structural and functional characterizations of Al+ implanted 4H-SiC layers and Al+ implanted 4H-SiC pn junctions after 1950° C post implantation annealing

R Nipoti, A Parisini, G Sozzi… - ECS Journal of Solid …, 2016 - iopscience.iop.org
In the case of Al+ implanted 4H-SiC, a post implantation annealing temperature of 1950 C
has the beneficial effect of maximizing both the electrical activation of implanted Al and the …

Hopping conduction range of heavily Al-doped 4H-SiC thick epilayers grown by CVD

S Ji, K Eto, S Yoshida, K Kojima, Y Ishida… - Applied Physics …, 2015 - iopscience.iop.org
To outline the hopping conduction range, the electrical characteristics of CVD-grown heavily
Al-doped 4H-SiC thick epilayers (2.0× 10 19–4.0× 10 20 cm− 3) were investigated in a wide …

Electrical Properties of Heavily Al-Doped 4H-SiC

H Matsuura, A Takeshita, R Nishihata… - Materials Science …, 2023 - Trans Tech Publ
We investigate the temperature-dependent resistivity (ρ (T)) and Hall coefficient (RH (T)) of
heavily Al-doped 4H-SiC and discuss the underlying conduction mechanisms. The sign of …

[HTML][HTML] Al–O–Al defect complexes as possible candidates for channel electron mobility reducing trapping centers in 4H-SiC metal–oxide–semiconductor field-effect …

N Smith, J Berens, G Pobegen, T Grasser… - Journal of Applied …, 2024 - pubs.aip.org
The deep-level drain current transient spectroscopy (Id-DLTS) measurements of Al-doped
SiC metal–oxide–semiconductor field-effect transistors (MOSFETs) strongly suggest that the …

[HTML][HTML] Negative Hall coefficient in band conduction region in heavily Al-doped 4H-SiC

H Matsuura, A Hidaka, S Ji, K Eto, Y Ishida… - Journal of Applied …, 2023 - pubs.aip.org
At low temperatures, the Hall coefficients in heavily Al-doped 4H-SiC are reported to be
negative in the band conduction region as well as in the hopping conduction regions (ie …

1950° C post implantation annealing of Al+ implanted 4H-SiC: Relevance of the annealing time

P Fedeli, M Gorni, A Carnera, A Parisini… - ECS Journal of Solid …, 2016 - iopscience.iop.org
Previous studies have shown that the electrical activation of a given implanted Al
concentration in 4H-SiC increases with the increasing of the post implantation annealing …