S Ji, K Eto, S Yoshida, K Kojima, Y Ishida… - Applied Physics …, 2015 - iopscience.iop.org
To outline the hopping conduction range, the electrical characteristics of CVD-grown heavily
Al-doped 4H-SiC thick epilayers (2.0× 10 19–4.0× 10 20 cm− 3) were investigated in a wide …