A review of micromachined thermal accelerometers
R Mukherjee, J Basu, P Mandal… - … of Micromechanics and …, 2017 - iopscience.iop.org
A thermal convection based micro-electromechanical accelerometer is a relatively new kind
of acceleration sensor that does not require a solid proof mass, yielding unique benefits like …
of acceleration sensor that does not require a solid proof mass, yielding unique benefits like …
Micromachined fluid inertial sensors
S Liu, R Zhu - Sensors, 2017 - mdpi.com
Micromachined fluid inertial sensors are an important class of inertial sensors, which mainly
includes thermal accelerometers and fluid gyroscopes, which have now been developed …
includes thermal accelerometers and fluid gyroscopes, which have now been developed …
From sensor networks to internet of things. Bluetooth low energy, a standard for this evolution
Current sensor networks need to be improved and updated to satisfy new essential
requirements of the Internet of Things, where cutting-edge applications will appear. These …
requirements of the Internet of Things, where cutting-edge applications will appear. These …
A dual axis CMOS micromachined convective thermal accelerometer
We present a dual axis accelerometer made with a frontside bulk micromachining on a 0.35
μm CMOS. The accelerometer is based on thermal convection where a central suspended …
μm CMOS. The accelerometer is based on thermal convection where a central suspended …
Simulation and testing of a MEMS calorimetric shear-stress sensor
The principle of operation of a new MEMS calorimetric shear-stress sensor is described. The
sensor is based on the detection of the thermal wake generated by a heated beam over a …
sensor is based on the detection of the thermal wake generated by a heated beam over a …
A piezoresistive micro-accelerometer with high frequency response and low transverse effect
P Wang, Y Zhao, B Tian, Y Liu, Z Wang… - Measurement …, 2016 - iopscience.iop.org
With the purpose of measuring vibration signals in high-speed machinery, this paper
developed a piezoresistive micro-accelerometer with multi-beam structure by combining four …
developed a piezoresistive micro-accelerometer with multi-beam structure by combining four …
Respiration and heartbeat signal detection from airflow at airway in rat by catheter flow sensor with temperature compensation function
Y Hasegawa, H Kawaoka, T Yamada… - Journal of …, 2017 - iopscience.iop.org
We previously proposed an evaluation method for detecting both respiration and heartbeat
signals from the airflow at the mouth (Kawaoka et al 201518th Int. Conf. on Solid-State …
signals from the airflow at the mouth (Kawaoka et al 201518th Int. Conf. on Solid-State …
Sensitivity and frequency-response improvement of a thermal convection–based accelerometer
This paper presents a thermal convection–based sensor fabricated using simple
microelectromechanical systems (MEMS)-based processes. This sensor can be applied to …
microelectromechanical systems (MEMS)-based processes. This sensor can be applied to …
On-chip integration of acceleration, pressure, and temperature composite sensor with a single-sided micromachining technique
Q Wang, X Li, T Li, M Bao… - Journal of …, 2011 - ieeexplore.ieee.org
This paper presents a novel composite sensor that is monolithically integrated with an
accelerometer, a pressure sensor, and a thermometer by using a single-side-processed …
accelerometer, a pressure sensor, and a thermometer by using a single-side-processed …
Development of a dual-axis micromachined convective accelerometer with an effective heater geometry
This paper describes the design, fabrication and testing of a dual-axis micromachined
convective accelerometer with a diamond-shaped heater. Modification of heater geometry is …
convective accelerometer with a diamond-shaped heater. Modification of heater geometry is …