A piezoelectric actuator based on parasitic motion principle is proposed and tested. The
piezoelectric actuator is explored to simultaneously realize coarse (long stroke) and fine …

A precise linear-rotary positioning stage (LRPS) for optical focusing based on the stick-slip
mechanism was proposed. The proposed positioning stage could realize linear motion …

Fast tool servo (FTS) in ultra-precision machining (UPM) is an enabling and efficient
technology for fabricating optical freeform surfaces or microstructures with submicrometric …

With an increasing demand of photoelectric components, the micro/ultraprecision machining
technology has become more and more important. However, for some particular …

The limited degrees of freedom (DOFs) of servo motions is an inherent deficiency in
conventional, fast-tool-servo-(FTS)-assisted, diamond-turning, highly blocking applications …

This paper presents an optimal design of a compliant linear-guide mechanism for a high-
precision feed drive. In this design, semi-circular flexural hinges are integrated with rigid …

A dual-servo nanopositioning stage for high-accuracy rotary motion is presented in this
article. A piezoelectric actuator is employed to achieve both the coarse motion and fine …

The three-dimensional (3-D) vibration-assisted turning (VAT) has attracted increasing
attention for its merits in microstructure sculpturing and ultraprecision machining. However …

Cutting force measurement is important for monitoring the diamond cutting process. In this
paper, a new measurement method of thrust cutting force associated with a voice coil motor …

Slow tool servo (STS) turning is a superior process for machining precision and complicated
surfaces that has already gained a wide application especially in optics industry. However, it …