Effect of deposition parameters on surface roughness and consequent electromagnetic performance of capacitive RF MEMS switches: a review

Z Chen, W Tian, X Zhang, Y Wang - Journal of Micromechanics …, 2017 - iopscience.iop.org
Surface roughness seriously affects the electromagnetic performance of capacitive radio
frequency (RF) micro-electromechanical system (MEMS) switches. This review presents the …

Polyimide–nickel nanocomposites fabrication, properties, and applications: A review

ND Jaji, MBH Othman, HL Lee, MH Hussin… - Reviews on Advanced …, 2023 - degruyter.com
Taking inspiration from many published review articles in respect of polyimide–nickel
nanocomposites (PINiNCs), this article is written to highlight the significant effect of …

[HTML][HTML] Effect of annealing temperature on microstructure and mechanical response of sputter deposited Ti-Zr-Mo high temperature shape memory alloy thin films

BCG Marupalli, T Adhikary, BP Sahu, R Mitra… - Applied Surface Science …, 2021 - Elsevier
The shape memory thin films are most suitable candidates as actuators in MEMS
applications than other smart materials due to its ability to produce larger recovery strains at …

Fatigue behavior of freestanding nickel-molybdenum-tungsten thin films

JH Park, Y Park, S Choi, ZF Lee, GD Sim - Nanoscale, 2024 - pubs.rsc.org
This research addresses the fatigue behavior of freestanding nickel-molybdenum-tungsten
(Ni-Mo-W) thin films with high-density planar faults. As-deposited Ni-Mo-W thin film …

Structural properties and sensing performance of Ni–Ti alloy films for extended-gate field-effect transistor pH sensors

TM Pan, CH Yang, ST Pang - Materials Science in Semiconductor …, 2023 - Elsevier
This study presents a facile Ni–Ti alloyed film grown on the n+-type Si through a DC
sputtering technique for electrochemical pH sensing and its comprehensive structural …

Synthesis of nano-patterned and Nickel Silicide embedded amorphous Si thin layer by ion implantation for higher efficiency solar devices

D Bhowmik, S Bhattacharjee, D Lavanyakumar… - Applied Surface …, 2017 - Elsevier
We report the ion beam based single step synthesis process of surface-patterned
amorphous Silicon (a-Si) with a buried plasmon active nickel silicide layer for the realization …

Properties of nickel films growth by radio frequency magnetron sputtering at elevated substrate temperatures

N Muslim, YW Soon, CM Lim, NY Voo - Thin Solid Films, 2016 - Elsevier
Pure nickel (Ni) thin films of thicknesses of 100 nm were deposited on glass substrates by
radio frequency magnetron sputtering at a power of 100 W and at various substrate …

Dewetting of Ni thin films obtained by atomic layer deposition due to the thermal reduction process: Variation of the thicknesses

D Alburquenque, M Del Canto, C Arenas, F Tejo… - Thin Solid Films, 2017 - Elsevier
Nickel oxide thin films with different thicknesses were synthesized by atomic layer
deposition. After a thermal reduction process, under a controlled atmosphere of hydrogen, it …

Microstructure and Properties of Thin-Film Submicrostructures Obtained by Rapid Thermal Treatment of Nickel Films on Silicon

V Lapitskaya, R Trukhan, T Kuznetsova, J Solovjov… - Surfaces, 2024 - mdpi.com
Nickel films of 40 nm thickness were obtained by means of magnetron sputtering on a single-
crystalline silicon substrate. The films were subjected to rapid thermal treatment (RTT) for 7 s …

Laser-based fabrication of microstructures on nickel thin films and its applications in on-chip thin film inductors

S Itapu, V Borra, DG Georgiev - IEEE Transactions on …, 2020 - ieeexplore.ieee.org
This work reports on the fabrication of microbump structures on nickel (Ni) films by single-
pulse, localized laser irradiation. Conditions for the reproducible formation of such …