Status and prospects of cubic silicon carbide power electronics device technology

F Li, F Roccaforte, G Greco, P Fiorenza, F La Via… - Materials, 2021 - mdpi.com
Wide bandgap (WBG) semiconductors are becoming more widely accepted for use in power
electronics due to their superior electrical energy efficiencies and improved power densities …

Residual Stress Characterization in Microelectronic Manufacturing: An Analysis Based on Raman Spectroscopy

Z Yang, X Wang, W Chen, H Tang… - Laser & Photonics …, 2024 - Wiley Online Library
In the rapidly evolving era of information and intelligence, microelectronic devices are
pivotal across various fields, such as mobile devices, big data computing, electric vehicles …

Effect of nitrogen and aluminum doping on 3C-SiC heteroepitaxial layers grown on 4 Off-axis Si (100)

C Calabretta, V Scuderi, R Anzalone, M Mauceri… - Materials, 2021 - mdpi.com
This work provides a comprehensive investigation of nitrogen and aluminum doping and its
consequences for the physical properties of 3C-SiC. Free-standing 3C-SiC heteroepitaxial …

Characterization of 4H-and 6H-like stacking faults in cross section of 3C-SiC epitaxial layer by room-temperature μ-photoluminescence and μ-raman analysis

V Scuderi, C Calabretta, R Anzalone, M Mauceri… - Materials, 2020 - mdpi.com
We report a comprehensive investigation on stacking faults (SFs) in the 3C-SiC cross-
section epilayer. 3C-SiC growth was performed in a horizontal hot-wall chemical vapour …

Large area growth of cubic silicon carbide using close space PVT by application of homoepitaxial seeding

M Kollmuss, M Schöler, R Anzalone… - Materials Science …, 2022 - Trans Tech Publ
One setback that hinders the breakthrough of cubic silicon carbide is the lack of suitable
seeding material for sublimation growth methods such as PVT. We present the growth of …

A study on free-standing 3C-SiC bipolar power diodes

F Li, AB Renz, A Pérez-Tomás, V Shah… - Applied Physics …, 2021 - pubs.aip.org
A low p–n built-in potential (1.75 V) makes 3C-SiC an attractive choice for medium voltage
bipolar or charge balanced devices. Until recently, most 3C-SiC had been grown on Si, and …

In situ bow reduction during sublimation growth of cubic silicon carbide

M Kollmuß, M Mauceri, M Roder, F La Via… - Reviews on Advanced …, 2022 - degruyter.com
Sublimation growth of cubic silicon carbide (3C–SiC) with diameters of 50 and 100 mm was
performed on freestanding homoepitaxial grown seeds. For both seeds and sublimation …

Residual Stress Characterization in Microelectronic Manufacturing

Z Yang, X Wang, W Chen, H Tang, R Zhang, X Fan… - 2024 - repository.tudelft.nl
In the rapidly evolving era of information and intelligence, microelectronic devices are
pivotal across various fields, such as mobile devices, big data computing, electric vehicles …

[引用][C] Growth of 3C-SiC using CS-PVT for application in power electronics and photonics

M Kollmuß - 2023 - Dissertation, Erlangen, Friedrich …