In-situ diagnostics of PECVD AlOx deposition by optical emission spectroscopy
K Kim, S Winderbaum, Z Hameiri - Surface and Coatings Technology, 2017 - Elsevier
Plasma enhanced chemical vapor deposition (PECVD) is ubiquitously used in the crystalline
silicon photovoltaics industry to deposit surface passivation and anti-reflection coatings …
silicon photovoltaics industry to deposit surface passivation and anti-reflection coatings …
Industrial PECVD AlOx films with very low surface recombination for Silicon Solar Cells
KH Kim - 2019 - unsworks.unsw.edu.au
Aluminium oxide (AlOx) plays a critical role in increasing silicon solar cell efficiency and is
used as a rear side surface passivation layer for the passivated emitter and rear cell (PERC) …
used as a rear side surface passivation layer for the passivated emitter and rear cell (PERC) …