S Wang, J Zhao, J Gu, M Bu, L Fan,
S Li, X Qin… - Chinese Optics …, 2022 - opg.optica.org
Lithium niobate (LiNbO _3, LN) channel and ridge waveguides have been successfully
fabricated by He ion implantation, which has energy of 500 keV and fluence of 1.5× 10 …