This article discusses the application of geomorphometric methods in microelectronic
metrology. Six typical microelectronic items were geomorphometrically analyzed using their …

The piezoelectric MEMS (micro-electro-mechanical systems) scanning mirrors are in a great
demand for numerous optoelectronic applications. However, the existing actuation …

Beam steering is essential for a variety of optical applications such as communication,
LIDAR, and imaging. Microelectromechanical system (MEMS) mirrors are an effective …

In visible light communication (VLC), the quality of communication is primarily dominated by
line-of-sight links. To ensure an appropriate link quality anywhere, beamsteering has been …

We discuss a technique for investigating changes in complex topography and shape of
structures using geomorphometric methods to study surfaces of wafers and membranes …

A cell culture well with integrated mechanical and optical stimulation is presented. This is
achieved by combining dielectric elastomer soft actuators, also known as artificial muscles …

This study presents an electrically actuated tilting micro platform based on liquid
dielectrophoresis with three axes movement using three droplets situated 120° apart from …

Optical wireless communications (OWCs) have been widely studied to provide high-speed
wireless services in indoor environments, and the combination of beam steering with …

Free space optics laser communication using modulating retroreflectors (MR) is a
challenging application for an active mirror, due to the high frequencies (> 100 kHz) required …

Рассмотрена методика исследования изменения сложного рельефа и формы структур
с использованием подходов геоморфометрии для изучения поверхности пластин и …