A squared bossed diaphragm piezoresistive pressure sensor based on CNTs for low pressure range with enhanced sensitivity
R Devi, SS Gill - Microsystem technologies, 2021 - Springer
Abstract This paper presents Micro-Electro-Mechanical System (MEMS) diaphragm based
piezoresistive pressure sensor for biomedical applications. A piezoresistive pressure sensor …
piezoresistive pressure sensor for biomedical applications. A piezoresistive pressure sensor …
Design and optimization of a novel structural MEMS piezoresistive pressure sensor
C Li, F Cordovilla, R Jagdheesh, JL Ocaña - Microsystem Technologies, 2017 - Springer
A novel structural piezoresistive pressure sensor with four-beams-structured membrane has
been proposed for low pressure measurements of less than 5 kPa based on silicon …
been proposed for low pressure measurements of less than 5 kPa based on silicon …
Modelling and simulation of MEMS graphene pressure sensor for healthcare devices
In this paper, sensitive piezoresistive graphene pressure sensor is designed and analysed
for applications in field of biomedical for healthcare devices. The relationship between …
for applications in field of biomedical for healthcare devices. The relationship between …
Design, fabrication and characterization of an annularly grooved membrane combined with rood beam piezoresistive pressure sensor for low pressure measurements
C Li, J Xie, F Cordovilla, J Zhou, R Jagdheesh… - Sensors and Actuators A …, 2018 - Elsevier
A novel structure piezoresistive pressure sensor with annularly grooved membrane
combined with rood beam has been designed for low pressure measurements. By …
combined with rood beam has been designed for low pressure measurements. By …
Investigation of MEMS piezoresistive pressure sensor with a freely supported rectangular silicon carbide diaphragm as a primary sensing element for altitudinal …
Silicon and Polysilicon are used as piezoresistive materials in MEMS (Micro
Electromechanical system) piezoresistive pressure sensors because of its reproducibility …
Electromechanical system) piezoresistive pressure sensors because of its reproducibility …
A high sensitive graphene piezoresistive MEMS pressure sensor by integration of rod beams in silicon diaphragm for low pressure measurement application
MEMS piezoresistive pressure sensors are most widely explored for various applications
such as industrial, automotive and medical field. Each application covers a wide operating …
such as industrial, automotive and medical field. Each application covers a wide operating …
A review of factors affecting the sensitivity of piezoresistive microcantilever based MEMS force sensor
The performance of the MEMS sensor depends upon different parameters such as
sensitivity, dynamic range, accuracy, hysteresis, linearity, resolution, bandwidth …
sensitivity, dynamic range, accuracy, hysteresis, linearity, resolution, bandwidth …
Design optimisation of high sensitivity MEMS piezoresistive intracranial pressure sensor using Taguchi approach
M Mohamad, N Soin, F Ibrahim - Microsystem Technologies, 2018 - Springer
MEMS piezoresistive pressure sensors have been contemporarily used to measure
intracranial pressure. Since an intracranial signal is of the pulsating type, the microsensor …
intracranial pressure. Since an intracranial signal is of the pulsating type, the microsensor …
Mathematical modeling and numerical simulation of a single-turn MEMS piezoresistive pressure sensor for enhancement of performance metrics
Micro-Electro-Mechanical System (MEMS)-based pressure sensors operating on the
principle of piezoresistivity have found profound application in various fields like automobile …
principle of piezoresistivity have found profound application in various fields like automobile …
Empirical model for substrate resistivity influence on MEMS capacitive accelerometer performance
M Pournia, M Kolahdouz, M Fathipour… - Sensors and Actuators A …, 2023 - Elsevier
Resistivity of the substrate is a key parameter in designing MEMS devices and affects the
device performance. Yet, the effects of this parameter on capacitive MEMS accelerometer …
device performance. Yet, the effects of this parameter on capacitive MEMS accelerometer …