This work demonstrates a piezoelectric MEMS dual-resonator platform with an oven control.
The platform includes a micro-oven in-chip, which integrates a frequency output resonator …

This work reports the successful excitation of a novel bulk acoustic mode whose actuation
and sensing are facilitated by the support transducer topology (STT). The design …

This work reports on a low phase noise microelectromechanical system (MEMS) oscillator,
leveraging a combination of high quality factor (Q) and low loss achieved by a contour mode …

This study presents a micro-electromechanical system (MEMS) oscillator built using a Lamb
wave resonator fabricated on X-cut Lithium Tantalate (LT). Leveraging the unique …

Background A microelectromechanical systems (MEMS) resonator with a high quality factor
can improve the phase noise of the oscillators as well as the insertion loss of the filters …

Piezoelectric Laterally Vibrating Resonators (LVRs) have attracted significant attention as a
potential technology for next-generation wafer-level multi-band filters. Piezoelectric bilayer …

This paper presents an aluminum-scandium nitride on silicon (AlScN-on-Si) bulk acoustic
wave resonator with ultra-high Q and quadratic temperature characteristic of frequency. For …

This paper reports the first study of near-carrier phase noise (PN) dependency on the
resonator volume/harmonic-number in thin-film piezoelectric-on-substrate (TPoS) MEMS …

All radio devices require a highly accurate frequency reference with superb temperature
stability. While quartz-based oscillators meet accuracy demands, they cannot be easily …