K Miyake, T Ito, M Isobe, K Karahashi… - Japanese Journal of …, 2014 - iopscience.iop.org
In reactive-ion etching (RIE) of silicon oxide (SiO 2) or silicon nitride (SiN) by fluorocarbon
(FC) or hydrofluorocarbon (HFC) plasmas, fluorinated carbon layers may be formed on the …