Strain: A solution for higher carrier mobility in nanoscale MOSFETs

M Chu, Y Sun, U Aghoram… - Annual Review of …, 2009 - annualreviews.org
Metal-oxide-semiconductor field-effect transistors (MOSFETs) have shown impressive
performance improvements over the past 10 years by incorporating strained silicon (Si) …

[图书][B] FinFETs and other multi-gate transistors

JP Colinge - 2008 - Springer
The adoption of Silicon-on-Insulator (SOI) substrates for the manufacturing of mainstream
semiconductor products such as microprocessors has given SOI research an …

[图书][B] Leakage in nanometer CMOS technologies

SG Narendra, AP Chandrakasan - 2006 - books.google.com
Scaling transistors into the nanometer regime has resulted in a dramatic increase in MOS
leakage (ie, off-state) current. Threshold voltages of transistors have scaled to maintain …

Modeling, Simulation and Analysis of Surface Potential and Threshold Voltage: Application to High-K Material HfO2 Based FinFET

S Panchanan, R Maity, S Baishya, NP Maity - Silicon, 2021 - Springer
In this study, an analytical model for surface potential and threshold voltage for undoped (or
lightly) doped tri-gate Fin Field Effect Transistor (TG-FinFET) is proposed and validated …

Hole mobility in silicon inversion layers: Stress and surface orientation

G Sun, Y Sun, T Nishida, SE Thompson - Journal of Applied Physics, 2007 - pubs.aip.org
Hole transport in the p-type metal-oxide-semiconductor field-effect-transistor (⁠ p-MOSFET)
inversion layer under arbitrary stress, surface, and channel orientation is investigated by …

Multi-gate devices for the 32 nm technology node and beyond

N Collaert, A De Keersgieter, A Dixit, I Ferain… - Solid-State …, 2008 - Elsevier
Due to the limited control of the short channel effects, the high junction leakage caused by
band-to-band tunneling and the dramatically increased VT statistical fluctuations, the scaling …

Characterization of polymer layer formation during SiO2/SiN etching by fluoro/hydrofluorocarbon plasmas

K Miyake, T Ito, M Isobe, K Karahashi… - Japanese Journal of …, 2014 - iopscience.iop.org
In reactive-ion etching (RIE) of silicon oxide (SiO 2) or silicon nitride (SiN) by fluorocarbon
(FC) or hydrofluorocarbon (HFC) plasmas, fluorinated carbon layers may be formed on the …

Mapping of the mechanical response in Si/SiGe nanosheet device geometries

CE Murray, H Yan, C Lavoie, J Jordan-Sweet… - Communications …, 2022 - nature.com
The performance of next-generation, nanoelectronic devices relies on a precise
understanding of strain within the constituent materials. However, the increased flexibility …

Performance enhancement of MUGFET devices using super critical strained-SOI (SC-SSOI) and CESL

N Collaert, R Rooyackers, F Clemente… - 2006 Symposium on …, 2006 - ieeexplore.ieee.org
This paper describes the performance of nMOS and pMOS tall triple gate (MUGFET) devices
with fin widths down to 20 nm fabricated for the first time on super critical strained Si on …

Mobility Enhancement in Strained -FinFETs: Basic Insight and Stress Engineering

N Serra, D Esseni - IEEE transactions on electron devices, 2010 - ieeexplore.ieee.org
This paper presents both analytical models and Monte Carlo simulations concerning strain
engineering in n-type silicon FinFETs. Our analysis identifies the stress configurations and …