The feed system is a typical mechatronics system, as well as motion control equipment, that
serves as a fundamental component of CNC machine tools. Developing a precise …

The increasingly stringent performance requirement in integrated circuit manufacturing,
characterized by smaller feature sizes and higher productivity, necessitates the wafer stage …

The proportional type update rule (PTUR) is the most widely used iterative learning control
(ILC) scheme. Recently, a fractional-power type update rule (FTUR) was proposed to …

A direct data-driven iterative algorithm is developed to accurately estimate the H∞ norm of a
linear time-invariant system from continuous operation, ie, without resetting the system. The …

Accurate pattern transfer, coupled with stringent requirements for throughput and quality in
lithography systems, necessitates the wafer scanner executing an aggressive motion with …

Recent advances in learning-based control have increased interest in stable inversion to
meet growing performance demands. Here, we establish necessary and sufficient conditions …