The corrosion inhibition performance and mechanism of α-benzoin oxime on copper: a comprehensive study of experiments and DFT calculations

L Hu, W Sun, L Liu, Y Zhang, G Pan, Y Xu… - Colloids and Surfaces A …, 2024 - Elsevier
Copper corrosion poses a significant challenge to process stability and chip quality in the
field of integrated circuit manufacturing. This study comprehensively explored the corrosion …