Nanoscale metallic multilayers have been shown to have a wide range of outstanding
properties, which differ to a great extent from those observed in monolithic films. Their …

The article provides a review of the current state of affairs in the field of physics and
technology of multilayer beryllium-containing mirrors intended for projection lithography and …

Multifitting is a computer program designed specifically for modeling the optical properties
(reflection, transmission, absorption) of multilayer films consisting of an arbitrary number of …

Abstract Effect of Si and Be barrier layers on the intermixing of thin Cr and Sc layers, as-
deposited and after annealing in a wide range of temperatures was considered using X-ray …

The effect of nitridation of Cr, Sc or both layers in the ultrathin multilayer structure Sc/Cr on
the intermixing of thin Cr and Sc layers, as-deposited and after annealing at different …

The influence of Mo interlayers on the microstructure of films and boundaries, and the
reflective characteristics of Ru/Be multilayer mirrors (MLM) were studied by X-ray …

This paper presents a comparative study on W/Si and WSi 2/Si multilayers for analyzing the
asymmetric interfacial effect in Si-based multilayers. The interfacial characteristic …

Progress in the fabrication technology of normal incidence multilayer interference mirrors
permits the traditional optical methods of microscopy, astronomy, and lithography to be …

Chemical composition and significance of the interfaces in Cr/Be layered structures
depending on the thickness and ordering of beryllium and chromium layers were considered …

The results of a study of the structural and reflective characteristics of short-period multilayer
X-ray mirrors based on Mo/B4C at wavelengths 1.54 Å, 9.89 Å and 17.59 Å are presented …