Bistable microdevice with electrothermal compliant mechanism

C Joshitha, C Santhosh, BS Sreeja, S Rooban… - … on Electrical and …, 2022 - Springer
The compliance mechanism plays a crucial role in the MEMS (Micro-Electro-Mechanical
Systems) device design as it provides elastic body deformation through respective force and …

Semiconductor Solutions for 5G

C Tong - Advanced Materials and Components for 5G and …, 2022 - Springer
RF hardware for 5G user equipment will be increasingly integrated, with filter banks, high
density switches, antenna tuning, LNAs and PAs integrated into RFFEs with system on chip …

Modeling of The Fatigue Behavior of Micro-Switch

G Cui - 2021 - webthesis.biblio.polito.it
This thesis describes the suspended electrode's fatigue behavior in the RF-MEMS, mainly
investigating the effect of temperature on this behavior. Firstly, the suggested materials for …

[PDF][PDF] Mechanical and electrical properties of Amorphous Silicon Nitride thin films for MEMS

D Dergez - 2017 - scholar.archive.org
Besides well-established markets such as automotive, microelectromechanical systems
(MEMS) devices are readily integrated in a growing number of consumer, industrial, and …

[引用][C] Design and simulation of low actuation voltage shunt RF MEMS shunt capacitive switch with serpentine flexures & regular perforations

K Jayavardhani - Int J Eng Technol, 2018