Thermionic Vacuum Arc—A versatile technology for thin film deposition and its applications

R Vladoiu, M Tichý, A Mandes, V Dinca, P Kudrna - Coatings, 2020 - mdpi.com
This review summarizes the more-than-25-years of development of the so-called thermionic
vacuum arc (TVA). TVA is an anodic arc discharge in vapors of the material to be deposited; …

[HTML][HTML] Versatile techniques based on the Thermionic Vacuum Arc (TVA) and laser-induced TVA methods for Mg/Mg: X thin films deposition-A review

R Vladoiu, A Mandes, V Dinca, M Tichy… - Journal of Magnesium …, 2024 - Elsevier
Magnesium and magnesium thin alloy films were deposited using a thermionic vacuum arc
(TVA), which has multiple applications in the field of metallic electrodes for diodes and …

ZnS thin film deposition on Silicon and glass substrates by Thermionic vacuum Arc

M Özkan, N Ekem, S Pat, MZ Balbağ - Materials science in semiconductor …, 2012 - Elsevier
In this study, Silicon (Si) and glass substrates were coated with Zinc sulfide (ZnS) using
Thermionic Vacuum Arc (TVA) technique for the first time. With this technique, the coating …

Electrically conductive and optically transparent polyethylene terephthalate films coated with gold and silver by thermionic vacuum arc

M Zafer Balbağ, S Pat - Journal of Plastic Film & Sheeting, 2011 - journals.sagepub.com
This study shows the morphology, physical, mechanical, and optical properties of conductive
and transparent Ag and Au coated on polyethylene terephthalate (PET) by thermionic …

Growth and characterization of GaN thin film on Si substrate by thermionic vacuum arc (TVA)

M Kundakçı, A Mantarcı, E Erdoğan - Materials Research …, 2017 - iopscience.iop.org
Gallium nitride (GaN) is an attractive material with a wide-direct band gap (3.4 eV) and is
one of the significant III-nitride materials, with many advantageous device applications such …

Optical, structural, morphological and compositional characterization of a Co-doped GaAs semiconducting thin film produced by thermionic vacuum arc

V Şenay, S Özen, S Pat, Ş Korkmaz - Journal of Alloys and Compounds, 2016 - Elsevier
Abstract A 80 nm 2 at% Co-doped GaAs thin film was deposited on a glass substrate under
a high vacuum condition by means of the thermionic vacuum arc technique using GaAs and …

Optical properties of Se-doped ZnO nanocrystalline thin films deposition by thermionic vacuum arc system

S Pat, R Mohammadigharehbagh, NA Özgür… - Infrared Physics & …, 2024 - Elsevier
In this paper, the deposition of Se-doped ZnO nanocrystalline thin films onto glass and Si
substrates was carried out using a thermionic vacuum arc deposition system. The band gap …

Diamond-like carbon coated on polyethylene terephthalate by thermionic vacuum arc

S Pat, S Temel, N Ekem, Ş Korkmaz… - Journal of Plastic …, 2011 - journals.sagepub.com
Diamond-like carbon (DLC) coatings were deposited on transparent polyethylene
terephthalate (PET) using a thermionic vacuum arc (TVA) method. The TVA method …

Thermionic vacuum arc (TVA) technique for magnesium thin film deposition

MZ Balbag, S Pat, M Ozkan, N Ekem, G Musa - Physica B: Condensed …, 2010 - Elsevier
In this study, magnesium thin films were deposited on glass substrate by the Thermionic
Vacuum Arc (TVA) technique for the first time. We present a different technique for …

Low-cost sedimentation deposition of boron nanoparticle films for thermal neutron detection applications

M Park, S Rozhdestvenskyy, CH Lim, B Gnade… - Sensors and Actuators A …, 2022 - Elsevier
The stagnating supply of 3 He, the essential material used in gas proportional counters for
neutron detection, has recently motivated research activity in solid boron thin-film deposition …