Piezoresistive microcantilevers for humidity sensing
Wide-range humidity sensing and monitoring applications including instrumentation,
agriculture, meteorology, biomedicine, and food processing have attracted long-standing …
agriculture, meteorology, biomedicine, and food processing have attracted long-standing …
Microfabrication of X-ray optics by metal assisted chemical etching: A review
L Romano, M Stampanoni - Micromachines, 2020 - mdpi.com
High-aspect-ratio silicon micro-and nanostructures are technologically relevant in several
applications, such as microelectronics, microelectromechanical systems, sensors …
applications, such as microelectronics, microelectromechanical systems, sensors …
Metal assisted chemical etching of silicon in the gas phase: A nanofabrication platform for X-ray optics
High aspect ratio nanostructuring requires high precision pattern transfer with highly
directional etching. In this work, we demonstrate the fabrication of structures with ultra-high …
directional etching. In this work, we demonstrate the fabrication of structures with ultra-high …
Fabrication of ZnO nanorods and Chitosan@ ZnO nanorods on MEMS piezoresistive self-actuating silicon microcantilever for humidity sensing
This paper reports the fabrication method and humidity sensing performances of zinc oxide
nanorods (ZONRs) and chitosan self-assembled monolayers (SAMs) modified ZONRs …
nanorods (ZONRs) and chitosan self-assembled monolayers (SAMs) modified ZONRs …
Micro-heat sink based on silicon nanowires formed by metal-assisted chemical etching for heat dissipation enhancement to improve performance of micro …
This work demonstrates the micro-heat sink based on silicon nanowires formed by metal-
assisted chemical etching (MACE) for heat dissipation enhancement to improve the …
assisted chemical etching (MACE) for heat dissipation enhancement to improve the …
High‐Aspect‐Ratio Grating Microfabrication by Platinum‐Assisted Chemical Etching and Gold Electroplating
L Romano, J Vila-Comamala… - Advanced …, 2020 - Wiley Online Library
Diffractive optics play a key role in hard X‐rays imaging for which many scientific,
technological, and biomedical applications exist. Herein, high‐aspect‐ratio microfabrication …
technological, and biomedical applications exist. Herein, high‐aspect‐ratio microfabrication …
Liquid and solid states on-chip micro-supercapacitors using silicon nanowire-graphene nanowall-pani electrode based on microfabrication technology
Liquid and solid states on-chip micro-supercapacitors based on polyaniline (PANI) coated
on graphene nanowalls which grown on silicon nanowires were reported in this work. Novel …
on graphene nanowalls which grown on silicon nanowires were reported in this work. Novel …
3D Core–Shell TiO2@MnO2 Nanorod Arrays on Microcantilevers for Enhancing the Detection Sensitivity of Chemical Warfare Agents
G Thomas, D Spitzer - ACS Applied Materials & Interfaces, 2021 - ACS Publications
Nanostructured microcantilevers have shown promise for sensing application of molecules
in the vapor phase. Nanostructures have improved the molecule capture ability of …
in the vapor phase. Nanostructures have improved the molecule capture ability of …
Nanoengineered nanochannels for thermally ionic nanofluidic energy harvesting
This work demonstrates thermal-to-electric energy conversion based on ionic nanofluidic
transport in nanochannels inducted by a temperature gradient. Two types of highly periodic …
transport in nanochannels inducted by a temperature gradient. Two types of highly periodic …
Ion transport by gating voltage to nanopores produced via metal-assisted chemical etching method
In this work, we report a simple and low-cost way to create nanopores that can be employed
for various applications in nanofluidics. Nano sized Ag particles in the range from 1 to 20 nm …
for various applications in nanofluidics. Nano sized Ag particles in the range from 1 to 20 nm …