Improvement of dry etch-induced surface roughness of single crystalline β-Ga2O3 using post-wet chemical treatments

HK Lee, HJ Yun, KH Shim, HG Park, TH Jang… - Applied Surface …, 2020 - Elsevier
Post-wet chemical treatments using sulfuric acid and hydrogen peroxide mixture (SPM) or
tetramethyl ammonium hydroxide (TMAH) solutions were performed to reduce dry etch …

Low-voltage high-stability indium–zinc oxide thin-film transistor gated by anodized neodymium-doped aluminum

L Lan, M Zhao, N Xiong, P Xiao, W Shi… - IEEE electron device …, 2012 - ieeexplore.ieee.org
Neodymium-doped aluminum (Al-Nd) was used as a gate electrode and was anodized,
forming a layer of Nd: Al 2 O 3 as the dielectric for indium-zinc oxide (IZO) thin-film …

InGaZnO thin-film transistors with back channel modification by organic self-assembled monolayers

P Xiao, L Lan, T Dong, Z Lin, W Shi, R Yao… - Applied Physics …, 2014 - pubs.aip.org
InGaZnO (IGZO) thin-film transistors (TFTs) with back channel modified by different kinds of
self-assembled monolayers (SAMs) were fabricated. The mobility and electrical stability of …

Solution-processed high-mobility neodymium-substituted indium oxide thin-film transistors formed by facile patterning based on aqueous precursors

Z Lin, L Lan, S Sun, Y Li, W Song, P Gao… - Applied Physics …, 2017 - pubs.aip.org
Solution-processed neodymium-substituted indium oxide (InNdO) thin-film transistors (TFTs)
based on gel-like aqueous precursors were fabricated with a surface-selective deposition …

Preparation and electrical properties of N-doped ZnSnO thin film transistors

S Dai, T Wang, R Li, Q Wang, Y Ma, L Tian, J Su… - Journal of Alloys and …, 2018 - Elsevier
The preparation and electrical properties of N-doped ZnSnO (ZTO: N) thin film transistor
(TFT) with a staggered bottom-gate structure were studied in this paper. ZTO: N thin film …

Aqueous-solution-synthesized gallium oxide dielectrics for high-mobility thin-film transistors enhanced by phosphorus incorporation

W Xu, T Peng, L Chen, W Huang, S Zhuo, Q Lin… - Applied Physics …, 2022 - pubs.aip.org
Gallium oxide (Ga 2 O 3) is widely used as an ultra-wide bandgap semiconductor in
emerging optoelectronics. Recent works show that Ga 2 O 3 could be a promising high-κ …

High-mobility thin film transistors with neodymium-substituted indium oxide active layer

Z Lin, L Lan, P Xiao, S Sun, Y Li, W Song, P Gao… - Applied Physics …, 2015 - pubs.aip.org
Thin-film transistors (TFTs) with neodymium-substituted indium oxide (InNdO) channel layer
were demonstrated. The structural properties of the InNdO films as a function of annealing …

Ultra-thin anodized aluminium dielectric films: the effect of citric acid concentration and low-voltage electronic applications

S Sagar, N Mohammadian, S Park, LA Majewski… - …, 2020 - iopscience.iop.org
Anodically oxidized, ultra-thin (d< 10 nm) aluminium films emerge as the dielectric of choice
for low-cost thin film capacitors (TFCs), thin film transistors (TFTs), and bio-and chemical …

[HTML][HTML] Study of the correlation between the amorphous indium-gallium-zinc oxide film quality and the thin-film transistor performance

S Hu, K Lu, H Ning, R Yao, Y Gong, Z Pan, C Guo… - Nanomaterials, 2021 - mdpi.com
In this work, we performed a systematic study of the physical properties of amorphous
Indium–Gallium–Zinc Oxide (a-IGZO) films prepared under various deposition pressures, O …

[HTML][HTML] Mobility enhancement in amorphous In-Ga-Zn-O thin-film transistor by induced metallic in nanoparticles and Cu electrodes

S Hu, H Ning, K Lu, Z Fang, Y Li, R Yao, M Xu, L Wang… - Nanomaterials, 2018 - mdpi.com
In this work, we fabricated a high-mobility amorphous indium-gallium-zinc-oxide (a-IGZO)
thin-film transistor (TFT) based on alumina oxide (Al 2 O 3) passivation layer (PVL) and …